2018
DOI: 10.1088/0256-307x/35/9/096801
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Characteristics of Sb 6 Te 4 /VO 2 Multilayer Thin Films for Good Stability and Ultrafast Speed Applied in Phase Change Memory

Abstract: The Sb6Te4/VO2 multilayer thin films are prepared by magnetron sputtering and the potential application in phase change memory is investigated in detail. Compared with Sb6Te4, Sb6Te4/VO2 multilayer composite thin films have higher phase change temperature and crystallization resistance, indicating better thermal stability and less power consumption. Also, Sb6Te4/VO2 has a broader energy band of 1.58 eV and better data retention (125 ∘ C for 10 y). The crystallization is suppressed by the multilayer interfaces … Show more

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Cited by 6 publications
(2 citation statements)
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“…Figure 1 shows R-T curves of SS and SSOX thin films at the heating rate of 10 °C min −1 . With the increase of temperature, a continuous reduction in amorphous resistance is observed for all thin films, which is explained by the thermally activated hopping transport mechanism [25]. Before crystallization, the amorphous resistances increase from 5.02 × 10 4 Ω of SS to 1.49 × 10 7 Ω of SSO2.5 thin film in table 2.…”
Section: Resultsmentioning
confidence: 85%
“…Figure 1 shows R-T curves of SS and SSOX thin films at the heating rate of 10 °C min −1 . With the increase of temperature, a continuous reduction in amorphous resistance is observed for all thin films, which is explained by the thermally activated hopping transport mechanism [25]. Before crystallization, the amorphous resistances increase from 5.02 × 10 4 Ω of SS to 1.49 × 10 7 Ω of SSO2.5 thin film in table 2.…”
Section: Resultsmentioning
confidence: 85%
“…More grain boundaries have been reported to affect carrier transport, increasing the crystalline resistivity and lowing power consumption in RESET. 31 Electrical properties, including threshold switching, reset operation power, are also essential contents for choosing the storage media. 32 PCM devices based on the PCH [Sb 2 Te 3 (7 nm)/Ga 2 Sb 3 (3 nm)] 3 films were prepared using a CMOS process to prove the triplet state process.…”
Section: Resultsmentioning
confidence: 99%