Characteristics of semiconductor bridge (SCB) plasma generated in a micro-electro-mechanical system (MEMS)

Fabrication and Characterization of Al/NiO Energetic Nanomultilayers

“…In recent years, film ignition bridge devices have been widely reported, such as doped polycrystalline silicon [1][2][3][4], platinum [5], titanium [6], and chromium bridge [7], which can function in a few tens of microseconds and operate at one-tenth the input energy with over 30 times smaller in volume compared with the hot-wire devices. Thermal plasma is generated to ignite explosive powder by passing current through film bridge.…”

Fabrication and Characteristics of Energetic Igniters Realized Through Sputtered Tantalum Nitride(TaN) Film Bridge

“…With the increasing demand for small ignition devices, investigation of heavily semiconductor or metallic film bridge, especially for doped polycrystalline silicon, titanium, platinum and chromium bridge, has attracted much attention in recent years [1][2][3][4][5][6][7]. Film ignition bridge devices, which are over 30 times smaller in volume, can function in a few tens of microseconds and operate at onetenth the input energy compared with the hot-wire devices while improving no-fire conditions and electrostatic safety.…”

Temperature Measurement and Numerical Simulation of Semiconductor Bridge in Constant Current

“…Moreover, the fabrication process for SCB is fully compatible with standard microelectronics processing technology, opening the door to integrate the ignitors into the logic circuits or Micro Electronic Mechanical System (MEMS) and enhancing the functional ignitors for MEMS [7,8]. Therefore, the SCB has attracted attention from many researchers for its improved performance mentioned above.…”

“…Benson et al [2] found the phenomenon of vaporization process and plasma formation for SCB under the current plus applied to metal electrode. Kim et al [7][8][9]employed the microwave resonator probe to investigate the the behaviors of plasma generated by SCB such as the plasma density, the propagation speed for plasma and the plasma size with aid of the visualization of micro scale plasma and obtained the temperature of plasma through the optical emission spectra(180-700 nm) [10]. Furthermore, Park et al found that the peak of the single-SCB preceded that of the poly-SCB during the plasma generation process, indicating that the rising rate of the temperature with the single-SCB was higher than that of poly-SCB [8].…”

“…Based on the data analysis of infrared temperature measurement, steady-state mathematical model ( ) ( ) [3].The SCB of electro-explosive devices has a wide of applications in the areas such as automotive airbags, rocket ignition, and various ordnance system[4] to provide the igniting of energetic compounds for its improved firing performances in terms of high safety, low ignition energy and short ignition time [5,6]. Moreover, the fabrication process for SCB is fully compatible with standard microelectronics processing technology, opening the door to integrate the ignitors into the logic circuits or Micro Electronic Mechanical System (MEMS) and enhancing the functional ignitors for MEMS [7,8]. Therefore, the SCB has attracted attention from many researchers for its improved performance mentioned above.…”