2024
DOI: 10.1002/pssa.202400026
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Characteristics of Stacked GaInN‐Based Red, Green, and Blue Full‐Color Monolithic μLED Arrays Connected via Tunnel Junctions

Tatsunari Saito,
Naoki Hasegawa,
Yoshinobu Suehiro
et al.

Abstract: The use of μLEDs in self‐luminous displays is crucial for the development of high‐efficiency displays for virtual space services. For this purpose, a stacked monolithic GaInN‐based micro light‐eimtting diodes (μLED) device that emits red, green, and blue (RGB) light is obtained. The RGB layers are connected via tunnel junction (TJ) layers. The pixel density is 330 ppi (35 × 15 μm2 of μLED mesa area corresponding to the emission). The cross‐sectional transmission electron microscopy analysis indicates that ther… Show more

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