Characteristics of the flowing afterglow of a surface‐wave microwave discharge in a reactor loaded with a small diameter tube

Abstract

Applying the flowing afterglow of an N2O2 surface‐wave microwave discharge it is shown, that using 500–1000 sccm gas flow rates the afterglow can efficiently travel through a 4.5 mm polymer tube placed into the afterglow reactor, as well as simultaneously inside and around the tube. The afterglow along the reactor loaded with a 5 mm I.D. quartz tube is followed through the UV emission of NO(B) molecules created in the three‐body re‐association process of N‐ and O‐atoms, and by modeling calculations. It is shown that by placing the tube into reactor the pressure and the density of species increase. Along the tube the absolute density of atoms decrease due to the pressure drop there, which can be controlled through the system's pumping efficiency.

Research progress on atmospheric pressure lower-power microwave plasma sources and their application prospects

“…此外, 在材料表面等离子体改性和镀膜应用领域, 大气 压低功率微波等离子体射流的参数优越且不需要真空 系统, 竞争优势明显 [123][124][125][126][127][128][129] , 等等.…”