“…During the past decades, Na 0.5 Bi 0.5 TiO 3 (NBT) shows the potential in replacing lead-based compounds due to its excellent ferroelectric properties with a relatively large remanent polarization (P r ) of 38 μC/cm 2 and high Curie temperature (T c ) of 320 1C at room temperature [1]. Nevertheless, for NBT, especially in the form of thin film, its inherent electrical properties are difficult to be measured due to some commonly encountered difficulties, i.e.…”