Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD

Huang, Yujie; Wang, Qi; Wang, Mei; Fei, Zhenyi; Li, Musen

doi:10.1007/s12598-012-0491-x

Cited by 14 publications

(3 citation statements)

References 15 publications

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“…It further explains that the DLC coatings, with thicknesses around 1 ȝm, often exhibit high critical loads with hard materials as substrates, such as more than 100 N on Si or glass [51].…”

Section: Discussionmentioning

confidence: 99%

Indentation and scratch testing of DLC-Zr coatings on ultrafine-grained titanium processed by high-pressure torsion

Wang

Escudeiro

Polcar

et al. 2013

Wear

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High-pressure torsion was employed to refine the microstructure of grade 2 Ti under an imposed pressure of 3.0 GPa at room temperature. The microhardness of grade 2 Ti increased from 1.82 GPa for the coarse grain state to 3.05 GPa after high-pressure torsion processing, where this value is very close to the hardness of the Ti-6Al-4V alloy.Subsequently, several diamond-like carbon (DLC) coatings with thicknesses of ~1.4 Pm were deposited on as-received Ti, high-pressure torsion processed Ti and Ti-6Al-4V samples via physical vapour deposition. Both indentation and scratch tests showed a much improved adhesion of DLC-7Zr, DLC:H-7Zr and DLC-9Zr coatings with high-pressure torsion processed Ti as the substrate by comparison with the same coatings on coarse-grained Ti. The results suggest that commercial pure Ti processed by high-pressure torsion and coated with a diamond-like carbon coating provides a potential candidate material for bio-implant applications.

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“…It further explains that the DLC coatings, with thicknesses around 1 ȝm, often exhibit high critical loads with hard materials as substrates, such as more than 100 N on Si or glass [51].…”

Section: Discussionmentioning

confidence: 99%

Indentation and scratch testing of DLC-Zr coatings on ultrafine-grained titanium processed by high-pressure torsion

Wang

Escudeiro

Polcar

et al. 2013

Wear

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“…The Raman spectra of as grown NCDs on the Si substrate show the three important peaks, as shown in figure 2. The peaks at 1388 and 1571 cm -1 are related to D and G bands (Paul 2008;Hsu et al 2010;Vaghri et al 2011;Huang et al 2012). Whereas the D band for the NCD deposited on the Si substrate appeared at a low wavenumber at 1345 cm -1 , also the G peak position shifted to a lower wavenumber at 1517 cm -1 .…”

Section: Resultsmentioning

confidence: 97%

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

et al. 2014

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A sample and scalable synthetic strategy was developed for the fabrication of nanocrystalline SiC (nc-SiC) thin film. Thin sheet of nanocrystalline diamond was deposited on Si substrate by hot filamentassisted plasma-enhanced chemical vapour deposition system (HF-PECVD). Further, the resulting carbonbased sheet was heated at 1200 °C to allow a solid state reaction between C and Si substrate to form the SiC thin films. The synthesized films mainly consist of β-SiC nanowires with diameters of about 50 nm and tens of micrometers long. The nanowires axes lie along the [1 1 1] direction and possess a high density of planar defects. The β-SiC nanowires thin films exhibit the strong photoluminescence (PL) peak at a wavelength of 400 nm, which is significantly shifted to the blue compared with the reported PL results of SiC materials. The blue shift may be ascribed to morphology, quantum size confinement effects of the nanomaterials and abundant structure defects that existed in the nanowires.

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“…Large scale bulk film analysis by SEM-EDS and an XPS survey spectrum (Figure S3) both showed the presence of C and O, although no O-containing precursor gas was used. The presence of O is likely due to exposure of the film to the atmosphere. − Its concentration was approximately 4.8 atom % by SEM-EDS and 25 atom % from the XPS survey spectrum (both not taking H into consideration). The latter high value is the result of XPS having a much smaller penetration depth (a few nm) and indicating that O was mostly present on the film surface.…”

Section: Results and Discussionmentioning

confidence: 99%

Synthesis of Diamond-Like Carbon Nanofiber Films

Lee

Ruoff

2020

ACS Nano

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A film formed of densely packed amorphous carbon nanofibers is synthesized by chemical vapor deposition using acetylene and hydrogen gases as precursors and copper nanoparticles (<25 nm in diameter) as the catalyst at low temperatures (220−300 °C). This film has a high concentration of sp 3 carbon (sp 3 /sp 2 carbon ratio of ∼1−1.9) with a hydrogen concentration of 25−44 atom %, which qualifies it as hydrogenated diamond-like carbon. This hydrogenated diamond-like carbon nanofiber film has properties akin to those of diamond-like carbon films. It has a high electrical resistivity (1.2 ± 0.1 × 10 6 Ω cm), a density of 2.5 ± 0.2 g cm −3 , and is chemically inert. Because of its morphology, different from diamond-like carbon films on the nanometer scale, it has a higher surface area of 28 ± 0.7 m 2 g −1 and has differences in mechanical properties, such as Young's modulus, hardness, and coefficient of friction. The hydrophobicity of this film is comparable to the best diamond-like carbon films, and it is wettable by oil and organic solvents. The nanofibers can also be separated from the substrate and each other and be used in a powder form. KEYWORDS: amorphous carbon nanofiber, diamond-like carbon, carbon film, buckling, sp 3 /sp 2 carbon ratio D iamond-like carbon (DLC) materials are amorphous

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Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD

Cited by 14 publications

References 15 publications

Indentation and scratch testing of DLC-Zr coatings on ultrafine-grained titanium processed by high-pressure torsion

Indentation and scratch testing of DLC-Zr coatings on ultrafine-grained titanium processed by high-pressure torsion

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

Synthesis of Diamond-Like Carbon Nanofiber Films

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