Characterization and Deembedding of Negative Series Inductance in On-Wafer Measurements of Thin-Film All-Oxide Varactors

Walk, Dominik; Kienemund, Daniel; Zeinar, Lukas; Salg, Patrick; Radetinac, Aldin; Komissinskiy, Philipp; Alff, Lambert; Jakoby, Rolf; Maune, Holger

doi:10.1109/lmwc.2019.2897901

Cited by 9 publications

(3 citation statements)

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“… in semiconductor technologies [5][6][7][8][9][10], in particular silicon technologies (Complementary Metal-Oxide-Semiconductor (CMOS) and Bipolar CMOS) that offer much lower cost as compared to Indium Phosphide (InP) or Gallium Arsenide (GaAs) technologies, and can address consumer applications,  with RF MicroElectroMechanical Systems (RF-MEMS) [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25], and  by using functional materials such as ferrites [26][27][28], ferroelectrics, mainly Barium Strontium Titanate (BST) capacitors, filters, and phase shifters in thin or thick-film technology [29][30][31][32][33][34][35][36][37][38][39][40][41][42][43][44] and the Microwave Liquid Crystal (MLC) technology beyond optics.…”

Section: Introductionmentioning

confidence: 99%

“…These reconfigurable/tunable components such as RF switches, varactors, adaptive matching networks and filters, frequency-agile antennas, frequency-selective surfaces, polarization-agile antennas and polarizer, discrete, and continuous phase shifters, and based on it, beam-steering antennas can be realized with different materials and technologies, which are symbolized in Figure 4 at the lower left: in semiconductor technologies [5][6][7][8][9][10], in particular silicon technologies (Complementary Metal-Oxide-Semiconductor (CMOS) and Bipolar CMOS) that offer much lower cost as compared to Indium Phosphide (InP) or Gallium Arsenide (GaAs) technologies, and can address consumer applications, with RF MicroElectroMechanical Systems (RF-MEMS) [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25], and by using functional materials such as ferrites [26][27][28], ferroelectrics, mainly Barium Strontium Titanate (BST) capacitors, filters, and phase shifters in thin or thick-film technology [29][30][31][32][33][34][35][36][37][38][39][40][41][42][43][44] and the Microwave Liquid Crystal (MLC) technology beyond optics.…”

Section: Introductionmentioning

confidence: 99%

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Microwave Liquid Crystal Enabling Technology for Electronically Steerable Antennas in SATCOM and 5G Millimeter-Wave Systems

Jakoby

Gaebler²,

Weickhmann³

2020

Crystals

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101

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Future satellite platforms and 5G millimeter wave systems require Electronically Steerable Antennas (ESAs), which can be enabled by Microwave Liquid Crystal (MLC) technology. This paper reviews some fundamentals and the progress of microwave LCs concerning its performance metric, and it also reviews the MLC technology to deploy phase shifters in different topologies, starting from well-known toward innovative concepts with the newest results. Two of these phase shifter topologies are dedicated for implementation in array antennas: (1) wideband, high-performance metallic waveguide phase shifters to plug into a waveguide horn array for a relay satellite in geostationary orbit to track low Earth orbit satellites with maximum phase change rates of 5.1°/s to 45.4°/s, depending on the applied voltages, and (2) low-profile planar delay-line phase shifter stacks with very thin integrated MLC varactors for fast tuning, which are assembled into a multi-stack, flat-panel, beam-steering phased array, being able to scan the beam from −60° to +60° in about 10 ms. The loaded-line phase shifters have an insertion loss of about 3 dB at 30 GHz for a 400° differential phase shift and a figure-of-merit (FoM) > 120°/dB over a bandwidth of about 2.5 GHz. The critical switch-off response time to change the orientation of the microwave LCs from parallel to perpendicular with respect to the RF field (worst case), which corresponds to the time for 90 to 10% decay in the differential phase shift, is in the range of 30 ms for a LC layer height of about 4 µm. These MLC phase shifter stacks are fabricated in a standard Liquid Crystal Display (LCD) process for manufacturing low-cost large-scale ESAs, featuring single- and multiple-beam steering with very low power consumption, high linearity, and high power-handling capability. With a modular concept and hybrid analog/digital architecture, these smart antennas are flexible in size to meet the specific requirements for operating in satellite ground and user terminals, but also in 5G mm-wave systems.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Microwave Liquid Crystal Enabling Technology for Electronically Steerable Antennas in SATCOM and 5G Millimeter-Wave Systems

Jakoby

Gaebler²,

Weickhmann³

2020

Crystals

Self Cite

101

View full text Add to dashboard Cite

show abstract

“…SrMoO 3 stands out among perovskite transition metal oxides because of its exceptionally low room-temperature resistivity of ≈ 5.1 µΩ cm, only about three times that of copper [1]. This remarkably high conductivity has sparked an interest into possible applications of SrMoO 3 in microwave electronics, as plasmonic devices or as electrodes in oxide heterostructures [2][3][4][5][6][7][8]. The high conductivity of SrMoO 3 is particularly remarkable when placed in the context of other 4d perovskite transition metal oxides.…”

mentioning

confidence: 99%