“…It can be used to eliminate residual internal stress and lattice defects, reduce film surface energy, bond between film layers, etc., and thus has an important impact on the physical and chemical characteristics (such as microscopic morphology, crystallinity, mechanical properties, electrical properties and optical properties, etc.) of the deposited films [ 26 , 27 , 28 , 29 , 30 , 31 , 32 ]. Zhou et al annealed the Au film based on electron beam deposition at 100 °C to 400 °C and analyzed the evolution of residual stress in the Au film after annealing; they found that the voids in the Au film were eliminated, the stability of the film increased and the stress level was also raised [ 33 ].…”