Investigation of the impact of hot-carrier-induced interface state generation on carrier mobility in nMOSFET Abstract-A comprehensive investigation on the hot carrier induced interface state generation and its impact on carrier mobility in nMOSFET is performed. I-V compact modelling and charge pumping characterization are used as independent ways to evaluate the interface state density as a function of hot carrier induced aging. From the two techniques, similar power-law time exponents of the interface state density kinetics are obtained. Assisted by the quasi-spectroscopic (temperature-resolved) charge pumping measurement, the extracted interface state density is further correlated with the I-V modelling results: an universal mobility degradation normalization parameter Nit,ref =~4.1x10 11 /cm 2 is reported, irrespective of the effective-oxide-thickness (EOT), stress temperature, or the relative degradation of the device-under-test (DUT). Supported by the fundamental principles deployed in the derivation as well as the broad range of experimental conditions considered for its validation, the reported normalization parameter could serve as a modelling constant in the commonly used I-V compact models to correlate the mobility degradation with the interface state density induced by hot carrier stress.