Characterization and modeling analysis on both ideality factor of the collector current ( C ) and the base current ( B ) have higher than the excepted values of 1.0 and 2.0, respectively, for npn AlGaN/ GaN heterojunction bipolar transistors (HBTs) have been reported. We employ the rapid thermal process annealing (RTP-annealing) to modify the base parasitical Schottky diode (called A-HBTs) after the as-deposited Ni/Au bilayers on the base layer for electrode with no annealing (called N-HBTs) to compare with each other. For a HBT operated in Gummel-plot con¯guration, experimental and modeling results indicate that the base parasitical Schottky diode (BPSD) causes the base current (I B ) and collector current (I C ) with high ideality factor and raise the base-emitter voltage (V BE ) to higher operation point, and therefore lead to more power consumption. Furthermore, the extended EbersÀMoll equivalent-circuit model together with the extracted device parameters provided simulated results that were in a good agreement with experimental ones.