Characterization and modelling of 3D piezoelectric ceramic structures with ATILA software

Heinonen, Esa; Juuti, Jari; Leppävuori, S.

doi:10.1016/j.jeurceramsoc.2005.03.083

Cited by 38 publications

(23 citation statements)

References 3 publications

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“…According to the previous studies by Heinonen et al [9][10][11] and Duval et al [12], the accuracy of the piezoelectric models decreased with higher (>1 V/µm) electric fields, mainly because non-linear characteristics are typical for the piezoelectric materials at higher voltages. As shown in Figs.…”

Section: Resultsmentioning

confidence: 92%

High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water

et al. 2010

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Piezoelectric thin film ultrasonic transducers were realised and tested for short range distance measurements. Displacements in air and water as a function of frequency were modelled by Comsol Multiphysics finite element modelling (FEM) and transducer configurations with a two electrode layout were manufactured to enable larger displacements than with the conventional design. The transducer was fabricated on a silicon wafer by chemical solution deposition (CSD) with total PZT (Pb(Zr 0.53 Ti 0.47 ) O 3 ) thickness of 2 µm. Subsequently, a cavity underneath the PZT was wet etched creating a bending membrane with a total thickness of ∼13 µm. The displacements of the transducers as a function of frequency were modelled and measured by fiber-optic laser vibrometer. The effective piezoelectric d 33 coefficient of 300 nm/V and 144 nm/V in air and 48 nm/V and 18 nm/V in water was obtained for 260×260 µm 2 and 390×390 µm 2 membranes, respectively.The accuracy of the modelled resonance frequencies both in air and water was relatively good, of ∼4-13% and ∼5-20%, respectively.

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Section: Resultsmentioning

confidence: 92%

High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water

et al. 2010

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“…The laser machined steps were designed to produce cross-sections with linearly and exponentially increasing thickness towards the edge of the actuators for both sample thicknesses previously used in RAINBOW and THUNDER actuators [10]. The exponential profile was copied from the cross-section of the RAINBOW actuators according to previous experiments [11,13]. After micro-machining the thinnest part of the actuators was 64% and 46% of the total thickness of 375 µm and 500 µm, respectively.…”

Section: Methodsmentioning

confidence: 99%

“…Contributing factors for the improved performance are suggested to be the massloading effect, reduced elastic stiffness, enhanced phase transition and enhanced domain reorientation due to a larger tensile stress compared to corresponding pre-stressed benders [4,10]. In addition, RAINBOW has a unique structure due to the reduction process at high temperature creating a non-uniform thickness of the piezoelectric and reduced layer [11][12][13]. In the earlier analysis only constant thickness for the reduced layer has been used and the effect of the non-uniform actuator geometry in displacement capabilities has not been reported.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical performance of structurally graded monolithic piezoelectric actuator

et al. 2008

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In this paper, the effect of structural gradients in monolithic piezoelectric actuators is investigated. Different cross-section profiles were micro-machined with a laser into commercial PZT 5H bulk discs with thicknesses of 375 µm and 500 µm (∅ 25 mm). Profiles and curvatures of the actuators were measured which showed both concave and convex structures, thus indicating pre-stress of the actuators. After poling, the distribution of out-of-plane displacement was scanned by a fibre-optic laser vibrometer. Maximum displacements of ∼6.3 µm and ∼24.8 µm were obtained from a freely moving and clamped ∼375 µm thick actuator, respectively, in a ±0.5 V/µm electric field at 10 Hz frequency without load. Furthermore, deflection in the centre of the actuators was measured up to 184 mN load using the same electric field and frequency. Bending of the bulk actuators without any additional layer was a consequence of the gradient in poling and driving electric field via thickness variation of the material. Hence, different regions produced strain distribution and bending in a similar fashion to other benders. Actuators with the highest arch height exhibited the highest displacement and load bearing capabilities derived from the increased area moment of inertia and enhanced piezoelectric response due to pre-stress. The results show that the monolithic bending actuators can be realised by simple structural designing of the actuator. Such structural gradients can be one reason contributing to the higher displacement of RAINBOW actuators compared to other pre-stressed actuators. In a further development, the structural gradients can be utilized in high displacement pre-stressed actuators and in miniaturized monolithic piezoelectric devices.

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“…We recall that the constitutive equation of the matrix can be written asT =L 1ε +Q 1 E and D =R 1ε +ˆ 1 E whereL 1 is the elastic stiffness tensor,ˆ 1 is the permittivity tensor andQ 1 andR 1 = −Q T 1 are the piezoelectric tensors of the matrix. The tensor properties of the PZT-5H matrix can be found in literature [46]. The magnetoelastic particle is inserted into the piezoelectric matrix with a specific initial magnetization direction γ 0 and a corresponding magnetostrictionε µ ( γ 0 ).…”

Section: Coupling With the External Electric And Elastic Fieldsmentioning

confidence: 99%

Thermal effects in magnetoelectric memories with stress-mediated switching

Giordano¹,

Dusch²,

Tiercelin³

et al. 2013

J. Phys. D: Appl. Phys.

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Abstract.Heterostructures with magneto-electro-elastic coupling (e.g. multiferroics) are of paramount importance for developing new sensors, actuators and memories. With the progressive miniaturization of these systems it is necessary to take into account possible thermal effects, which may influence the normal operating regime. As paradigmatic example we consider a recently introduced non-volatile memory element composed of a magnetostrictive nanoparticle embedded in a piezoelectric matrix. The distribution of the physical fields in this matrix/inclusion configuration are determined by means of the Eshelby theory, the magnetization dynamics is studied through the Landau-LifshitzGilbert formalism, and the statistical mechanics is introduced with the Langevin and Fokker-Planck methodologies. As result of the combination of such techniques we determine the switching time between the states of the memory, the error probability and the energy dissipation of the writing process. They depend on the ratio k B T/v where T is the absolute temperature and v is the volume of the magnetoelastic particle.

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Characterization and modelling of 3D piezoelectric ceramic structures with ATILA software

Cited by 38 publications

References 3 publications

High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water

High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water

Electromechanical performance of structurally graded monolithic piezoelectric actuator

Thermal effects in magnetoelectric memories with stress-mediated switching

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