2018
DOI: 10.18494/sam.2018.1733
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Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors

Abstract: Keywords: iridium oxide, pH microsensorIn this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported "carbonate-melt" method are modified, namely, the oxidization temperature, oxidization time, and annealing process after oxidization. Then, we compare the characteristics of the fabricated sensors (i.e., the initial pH responsivity, time… Show more

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Cited by 2 publications
(1 citation statement)
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“…After a comprehensive assessment carried out by comparing the sensitivity, Nernstian response range, and potential drift of metal/metal oxide electrodes, including Sb-Pb oxide, PtO 2 , IrO 2 , RuO 2 , Ta 2 O 5 , and WO 3 , iridium oxide (IrO x ) electrodes were found to be the most promising for pH detection. (14)(15)(16) The performance of IrO x electrodes is determined by the fabrication method used; methods include electrodeposition, (17)(18)(19) cyclic voltammetry (CV), (20)(21)(22) radio frequency (RF) magnetron sputtering deposition, (23)(24)(25)(26)(27) high-temperature carbonate oxidation, (2,(28)(29)(30)(31) and thermal oxidation. (14,(32)(33)(34)(35) The properties and structures of IrO x electrodes fabricated by different methods differ, among which IrO x electrodes fabricated by electrodeposition and CV exhibit a super-Nernstian response with an E (electrode potential)-pH sensitivity higher than −60 mV/pH.…”
Section: Introductionmentioning
confidence: 99%
“…After a comprehensive assessment carried out by comparing the sensitivity, Nernstian response range, and potential drift of metal/metal oxide electrodes, including Sb-Pb oxide, PtO 2 , IrO 2 , RuO 2 , Ta 2 O 5 , and WO 3 , iridium oxide (IrO x ) electrodes were found to be the most promising for pH detection. (14)(15)(16) The performance of IrO x electrodes is determined by the fabrication method used; methods include electrodeposition, (17)(18)(19) cyclic voltammetry (CV), (20)(21)(22) radio frequency (RF) magnetron sputtering deposition, (23)(24)(25)(26)(27) high-temperature carbonate oxidation, (2,(28)(29)(30)(31) and thermal oxidation. (14,(32)(33)(34)(35) The properties and structures of IrO x electrodes fabricated by different methods differ, among which IrO x electrodes fabricated by electrodeposition and CV exhibit a super-Nernstian response with an E (electrode potential)-pH sensitivity higher than −60 mV/pH.…”
Section: Introductionmentioning
confidence: 99%