Transparent p-type conductive CuGaO 2 films have been fabricated on sapphire substrates by sol-gel method. The stable sol solution for CuGaO 2 were formed by copper(II) acetate monohydrate and gallium(III) nitrate hydrate, and the c-axis orientation of CuGaO 2 films were strengthened with increasing annealing temperature. The pure phase CuGaO 2 film was obtained at 900 o C for 30 min in N 2 atmosphere, and its microstructure, compositions, optical and electrical properties were analyzed. It was found that the sol-gel derived CuGaO 2 films show a high optical transparency (60-80%) in the visible region, the direct and indirect band gaps were approximately 3.56 and 3.24 eV, respectively. It shows a crossover from the thermal activation behavior to that of three-dimensional variable range hopping from the temperature-dependent electrical conductivity at about 160 K.