Characterization of 3D MEMS structural dynamics with a conformal multi-channel fiber optic heterodyne vibrometer

Kilpatrick, James; Apostol, Adela; Markov, Vladimir B.

doi:10.1117/12.930570

Cited by 4 publications

(5 citation statements)

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“…The mode shapes of the same sample are also verified using a conformal imaging vibrometer (CIV) made by Advanced Systems & Technologies (AS&T Inc., Irvine, CA, USA) [33]. The CIV uses multi-channel fiber-optic heterodyne interferometry to dynamically image real-time structural behavior of planar and 3-D macro-and micro-vibratory resonators, by employing multiple fibers in a conformal array as schematically shown in Fig.…”

Section: A Mode Shape Verificationmentioning

confidence: 99%

“…(b) Polytec PSV 400 scanning laser vibrometer setup. (c) Schematic of Advanced Systems & Technologies conformal imaging vibrometer setup, showing two of eight fibers employed in a conformal array[32],[33].…”

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confidence: 99%

“…Normalized displacement patterns of n = 2 wineglass modes (14.7311 kHz and 14.8756 kHz) measured with Advanced Systems & Technologies conformal imaging vibrometer[32],[33]. The black and blue solid curves represent the displacement pattern of the two modes, with red dots indicating the eight conformal array measurement points.…”

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confidence: 99%

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3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Cho

Yan

Gregory

et al. 2013

J. Microelectromech. Syst.

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This paper presents a new and simple microfabrication process for creating various 3-D microstructures with highaspect ratios (height/radius >1). The key feature of this process is the use of a blow torch, which provides very intense localized heat for a short amount of time (<10 s). The flame temperature can be up to 2500°C for a propane-oxygen torch, above the melting temperatures of many high-Q materials. We demonstrate the fabrication of hemispherical and half-toroid (birdbath) shells from 100-µm-thick fused silica substrates. The structures have an rms surface roughness of 5.3 Å, which is crucial for achieving both high mechanical and optical Q. We create microbirdbath resonators by batch-level releasing the birdbath shells. We verify the resonance mode shapes of the degenerate n = 2 wineglass modes using laser vibrometry and measure the frequency and Q of these modes using laser vibrometry and a capacitive measurement method. We demonstrate one of the best mechanical Q and smallest frequency split between the n = 2 wineglass modes among existing micromechanical resonators. The birdbath resonator is promising for emerging applications such as the microrate-integrating gyroscope.[2013-0166]

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Section: A Mode Shape Verificationmentioning

confidence: 99%

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confidence: 99%

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3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Cho

Yan

Gregory

et al. 2013

J. Microelectromech. Syst.

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“…The frequency and time domain measurements (Fig. 4) are obtained by using a conformal imaging vibrometer (CIV) made by Advanced Systems & Technologies (AS&T Inc., Irvine, CA, USA) [14].…”

Section: Resultsmentioning

confidence: 99%

Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness

2015

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A highly-symmetric silicon dioxide shallow shell resonator with angstrom-level roughness (Ra=4.3Å) is presented. Curvature discontinuities in shallow shells, at a controlled distance from the base anchor of the shell, provide acoustic decoupling and significantly reduce the anchor contribution to the frequency split in degenerate wineglass modes as well as their damping. The Finite Element Method (FEM) simulations, performed in COMSOL 4.4, show increasing strain energy density at the vicinity of curvature discontinuities, confirming acoustic decoupling. The fabricated resonant shells are symmetric structures with largely asymmetric supports to force the anchoring stem to be the main contributor to the frequency split. ConformalImaging Vibrometer (CIV) measurement characterization indicate that the fabricated shallow shell resonators have as-born sub-Hz frequency splits (∆f/f≈60ppm), without any electrical frequency tuning, for the lowest elliptical mode shapes, while having asymmetric anchoring stems.

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“…1a) which was pumped down to 0.3 mtorr with a HiCube 80 Eco Pfeiffer turbo pumping station. The interferometer architecture together with vacuum integration of the probe station are described in detail elsewhere [4].…”

Section: Experimental Methodsmentioning

confidence: 99%

MEMS characterization with conformal imaging vibrometry (CIV)

Kilpatrick

Apostol

Markov

2014

2014 International Symposium on Inertial Sensors and Systems (ISISS)

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This paper discusses a new conformal imaging fiberoptic heterodyne vibrometer developed for in-vacuum measurement of MEMS micro-resonator spatial dynamics in real time. The all-fiber optic probe design incorporates many standard fiber-optic telecommunications components, configured to enable light delivery directly to the MEMS device under test in vacuum. The CIV measures the equatorial dynamics of micro-shells currently being developed as microscale hemispherical resonant gyroscopes (HRG). The modular fiber optic design lends itself readily to other conformal configurations (e.g planar, multi-faceted) or to simultaneous measurement of shell, stem and substrate dynamics.

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Characterization of 3D MEMS structural dynamics with a conformal multi-channel fiber optic heterodyne vibrometer

Cited by 4 publications

References 0 publications

3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness

MEMS characterization with conformal imaging vibrometry (CIV)

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