Characterization of a flourocarbon SAM coated MEMS tribogauge

MEMS-based Educational Laboratory

“…TTU design teams have won first place in the competition 7 out of 9 years. Some of these and other devices fabricated through the design competition have been utilized for various research projects including microstages 5,6 , micromirrors 7 , 8 microactuators 9,10,11 , microgrippers 12 , microsensors 13,14 , and microtribology 15,16 . In order to extend the benefits of the technology to other universities, a commercialization effort was begun in 2008 and came to fruition in 2010.…”