Micro-Electro-Mechanical Systems (MEMS) 2000
DOI: 10.1115/imece2000-1138
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Characterization of a MEMS-Fabricated Mixing Device

Abstract: This paper discusses the fabrication and the characterization of a MEMS-based micromixer. Active perturbations provided by a pressure source/sink system are used to enhance the mixing between two fluid streams. From our preliminary test, it appears that an effective mixing is possible through the generation of chaotic-like distortions at the interface between two streams. A numerical simulation based on a kinematical model reveals a similar behavior under the same condition.

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Cited by 23 publications
(8 citation statements)
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“…On the other hand, a wide variety of external energy sources have been applied in active micromixers. For example, micromixers using hydrodynamic pressure [13][14][15], electro-osmotic forces [16], dielectrophoretic forces [17], magnetohydrodynamic forces [18,19], peristaltic actuation [20][21][22][23], field effect [24][25][26][27] and ultrasonic forces [28,29] have been reported in the literature. Even though these types of active micromixers may effectively provide rapid mixing performance, the additional external components need extra energy and also sometimes require bulky peripheral apparatus.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, a wide variety of external energy sources have been applied in active micromixers. For example, micromixers using hydrodynamic pressure [13][14][15], electro-osmotic forces [16], dielectrophoretic forces [17], magnetohydrodynamic forces [18,19], peristaltic actuation [20][21][22][23], field effect [24][25][26][27] and ultrasonic forces [28,29] have been reported in the literature. Even though these types of active micromixers may effectively provide rapid mixing performance, the additional external components need extra energy and also sometimes require bulky peripheral apparatus.…”
Section: Introductionmentioning
confidence: 99%
“…Physically the mixing efficiency is the homogeneity at the exit nozzle. The quantity, mixing index (¾), [37][38][39] is defined to represent the homogeneity in the following equation:…”
Section: Fundamental Design and Analysismentioning
confidence: 99%
“…Active mixing entails the exertion of an external perturbation on the fluids, for example by using moving parts or a varying pressure gradient. 8,9) Active mixing tends to be rapid and controllable, with full mixing being achieved in a short time. 10) It has, however, proven difficult to fabricate, operate and maintain active mixers in the microchannels of biological fluidic devices.…”
Section: Introductionmentioning
confidence: 99%