Characterization of a microfluidic device fabricated using a photosensitive sheet

Ito, Takeshi; Kawaguchi, Taku; Miyoshi, Hideyuki; Maruyama, Kenichi; Kaneko, Satoru; Ohya, Seishiro; Iwasaki, Yoshiko; Niwa, Osamu; Suzuki, Kôji

doi:10.1088/0960-1317/17/3/003

Cited by 13 publications

(7 citation statements)

References 24 publications

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“…6a) [124,125]. Ito et al characterized the chemical and electrical properties of such films and reported compatibility with pressures up to 0.6 MPa when the DFR microfluidic layer is sandwiched between two PMMA layers [126]. As a notable example for rapid prototyping using DFRs, Zhao et al introduced a process, ''do it yourself 3D microfluidic chips'', which is based on multilayer lamination of DFRs and patterning them by direct projection lithography using a commercially available digital projector [127].…”

Section: New Prototyping Techniques Providing a Paradigm Shift For Sementioning

confidence: 99%

Lab-on-a-chip devices: How to close and plug the lab?

Temiz

Lovchik

Kaigala

et al. 2015

Microelectronic Engineering

416

276

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a b s t r a c tLab-on-a-chip (LOC) devices are broadly used for research in the life sciences and diagnostics and represent a very fast moving field. LOC devices are designed, prototyped and assembled using numerous strategies and materials but some fundamental trends are that these devices typically need to be (1) sealed, (2) supplied with liquids, reagents and samples, and (3) often interconnected with electrical or microelectronic components. In general, closing and connecting to the outside world these miniature labs remain a challenge irrespectively of the type of application pursued. Here, we review methods for sealing and connecting LOC devices using standard approaches as well as recent state-of-the-art methods. This review provides easy-to-understand examples and targets the microtechnology/engineering community as well as researchers in the life sciences.

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Section: New Prototyping Techniques Providing a Paradigm Shift For Sementioning

confidence: 99%

Lab-on-a-chip devices: How to close and plug the lab?

Temiz

Lovchik

Kaigala

et al. 2015

Microelectronic Engineering

416

276

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“…SU-8), DFRs are solid and available as rolls with typical thicknesses of the foil ranging from 5 µm to 100 µm (thicker layers can be obtained by multiple deposition) and length of up to 100 m. DFRs are meant to be laminated while applying some heat, exposed, developed, and post-baked [28,29]. DFRs were previously employed in the fabrication of microfluidic systems [19,21,[30][31][32]; however, these studies did not address the challenges of chip singulation, contamination of closed microchannels, high-throughput surface cleaning and treatment, and compatibility with integration of reagents. The physical properties of the cover film are important for fabricating functional microchannels and for easy chip singulation; therefore, an ideal DFR cover material should (i) be rigid enough to tent over microchannels without collapsing, (ii) be sufficiently brittle to allow breaking, (iii) have good adhesion to the microfluidic substrate to prevent delamination and leaks, (iv) be amenable to patterning by cutting, punching, or photolithography, (v) not interfere with the wettability of microchannels, (vi) have good optical properties, and (vii) be compatible with the reagents for biosensing applications or chemically stable for chemical sensing applications.…”

Section: Dry-film Resists For Sealing Microfluidic Chipsmentioning

confidence: 99%

‘Chip-olate’ and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips

Temiz

Delamarche

2014

J. Micromech. Microeng.

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This paper describes a technique for high-throughput fabrication and efficient singulation of chips having closed microfluidic structures and takes advantage of dry-film resists (DFRs) for efficient sealing of capillary systems. The technique is illustrated using 4-inch Si/SiO 2 wafers. Wafers carrying open microfluidic structures are partially diced to about half of their thickness. Treatments such as surface cleaning are done at wafer-level, then the structures are sealed using low-temperature (45 °C) lamination of a DFR that is pre-patterned using a craft cutter, and ready-to-use chips are finally separated manually like a chocolate bar by applying a small force (≤ 4 N). We further show that some DFRs have low auto-fluorescence at wavelengths typically used for common fluorescent dyes and that mechanical properties of some DFRs allow for the lamination of 200 μm wide microfluidic structures with negligible sagging (~1 μm). The hydrophilicity (advancing contact angle of ~60°) of the DFR supports autonomous capillary-driven flow without the need for additional surface treatment of the microfluidic chips. Flow rates from 1 to 5 µL min -1 are generated using different geometries of channels and capillary pumps. In addition, the 'chip-olate' technique is compatible with the patterning of capture antibodies on DFR for use in immunoassays. We believe this technique to be applicable to the fabrication of a wide range of microfluidic and lab-on-a-chip devices and to offer a viable alternative to many labor-intensive processes that are currently based on wafer bonding techniques or on the molding of poly(dimethylsiloxane) (PDMS) layers.

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“…We evaluated the characteristics of microfluidic devices produced from a photosensitive sheet for practical purposes. 47 To obtain thicker sheets, the sheets can be easily stacked by lamination. Figure 16 shows a cross section of a Pyrex-Photosensitive sheets-Pyrex layered sample.…”

Section: ·5 Microfluidic Devicesmentioning

confidence: 99%

Newly Developed Chemical Probes and Nano-Devices for Cellular Analysis

et al. 2008

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Homeostasis in an organism is maintained by activities within and between cells. Therefore, one is required to analyze both the cellular activities within cells, such as metabolisms or signal transduction, and cellular interactions, such as ligand-receptor recognition. We have developed a cellular analyzing system including a "real-time cellular imaging system" and a "comprehensive analysis system for cellular responses" as shown in Fig. 1. The system has been established using newly developed chemical probes and nano-devices. As chemical probes, we have developed 1) molecular imaging probes, and 2) mass probes.As nano-devices, we built 1) nano electrochemical and optical probes, 2) a sputtered nano-film electrode, 3) nano-dot SPR, 4) a nano-dot target plate for MS, and 5) microfluidic devices. We will review each of these probes and devices, and finally introduce a "real-time cellular imaging system" with an application model using PC12 cells and a "comprehensive analysis system for cellular responses", which measured IL-1β (interleukin-1β) as an example. Chemical Probes 2·1 Molecular imaging probesFluorescent imaging based on fluorescent probes offers a highly sensitive, high-speed spatial and temporal analysis of cells, and is widely used in the fields of biology and physiology. A cellular analyzing system including a "real-time cellular imaging system" and a "comprehensive analyzing system for cellular responses" was developed. A "real-time cellular imaging system" is a system used to measure real-time imaging of multiple phenomena of a single cell with high special and temporal resolutions for the purpose to understand the pathology and physiology in a single cell and realize to single cell level diagnosis. A "real-time cellular imaging system" includes multi-probe imaging with AFM (atomic force microscopy), optical and SECM (scanning electrochemical microscopy) modes, which provides us with topological information and biochemical reactions at the local area of the interior and exterior of a cell. Scanning electrochemical/optical microscopy was applied to image PC12 cells. On the other hand, cells respond to their specific substances via their ligands. Therefore, the comprehensive analysis of protein-protein interaction is the important issue to determine the functions of cells. For this purpose, a "comprehensive analysis system for cellular responses" was developed. This system is based on SPR (surface plasmon resonance) and MS (mass spectrometry) using a nano-fabricated substrate. The interaction between IL-1β and anti-IL-1β antibodies was detected.

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Characterization of a microfluidic device fabricated using a photosensitive sheet

Cited by 13 publications

References 24 publications

Lab-on-a-chip devices: How to close and plug the lab?

Lab-on-a-chip devices: How to close and plug the lab?

‘Chip-olate’ and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips

Newly Developed Chemical Probes and Nano-Devices for Cellular Analysis

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