Characterization of a SAW-Pirani vacuum sensor for two different operating modes

Mercier, Denis; Bordel, G.; Brunet-Manquat, P.; Verrun, S.; Elmazria, O.; Sarry, F.; Belgacem, B.; Bounoua, J.

doi:10.1016/j.sna.2012.01.039

Cited by 13 publications

(7 citation statements)

References 9 publications

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“…These devices are interesting because of their tunability to make it compatible with the frequencies of today’s electronic devices. The major advantages of using a SAW transducer are its high sensitivity and cost effectiveness [ 3 ]. SAW devices based on lithium niobate (LiNbO 3 ) crystals in particular have long been known for their high acoustic wave generation [ 4 ].…”

Section: Introductionmentioning

confidence: 99%

Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)/ZnO Nanocomposites

et al. 2016

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Surface acoustic wave (SAW) devices have been utilized for the sensing of chemical and biological phenomena in microscale for the past few decades. In this study, SAW device was fabricated by electrospinning poly(vinylidenefluoride-co-trifluoroethylene) (P(VDF−TrFE)) incorporated with zinc oxide (ZnO) nanoparticles over the delay line area of the SAW device. The morphology, composition, and crystallinity of P(VDF−TrFE)/ZnO nanocomposites were investigated. After measurement of SAW frequency response, it was found that the insertion loss of the SAW devices incorporated with ZnO nanoparticles was much less than that of the neat polymer-deposited device. The fabricated device was expected to be used in acoustic biosensors to detect and quantify the cell proliferation in cell culture systems.

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Section: Introductionmentioning

confidence: 99%

Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)/ZnO Nanocomposites

et al. 2016

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“…A lift-off process was used for the development of the IDTs [ 25 , 26 ]. For the lithography we used the photoresist AZ5214E (MicroChemicals, Ulm, Germany), and mask aligner MJB4 (SÜSS MicroTec,, Garching, Germany).…”

Section: Methodsmentioning

confidence: 99%

Love Wave Sensor with High Penetration Depth for Potential Application in Cell Monitoring

Chavez¹,

Bonhomme

Bellaredj

et al. 2022

Biosensors

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Love wave (L-SAW) sensors have been used to probe cell monolayers, but their application to detect changes beyond the focal adhesion points on cell monolayers, as viscosity changes on the cytoskeleton, has not been explored. In this work we present for the first time a Love wave sensor with tuned penetration depth and sensitivity to potentially detect mechanical changes beyond focal adhesion points of cell monolayers. We designed and fabricated a Love wave sensor operating at 30 MHz with sensitivity to detect viscous changes between 0.89 and 3.3 cP. The Love wave sensor was modeled using an acoustic transmission line model, whereas the response of interdigital transducers (IDTs) was modeled with the Campbell’s cross-field circuit model. Our design uses a substrate with a high electromechanical coupling coefficient (LiNbO3 36Y-X), and an 8-µm polymeric guiding layer (SU-8). The design aims to overcome the high insertion losses of viscous liquid environments, and the loss of sensitivity due to the low frequency. The fabricated sensor was tested in a fluidic chamber glued directly to the SU-8 guiding layer. Our experiments with liquids of viscosity similar to those expected in cell monolayers showed a measurable sensor response. In addition, experimentation with SaOs-2 cells within a culture medium showed measurable responses. These results can be of interest for the development of novel cell-based biosensors, and novel characterization tools for cell monolayers.

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“…It uses the fact that SAW sensors offer the possibility of accurate wireless temperature measurement with fully passive sensors [4]. After optimization of the sensor architecture, new sensor versions have been successively characterized in [5]- [7] where excellent sensitivity of the sensor has been observed. As a next step towards an autonomous system, the authors have tried to supply the heating element via a half-bridge architecture and a resonant transformer usually employed for wireless charging systems [10].…”

Section: Introductionmentioning

confidence: 99%

A completely wireless and passive low-pressure sensor

Krall

Nicolay

2015

2015 IEEE Tenth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)

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In this paper we present a low pressure sensor based on the Pirani principle. Conversely to conventional implementations, this novel concept employs a fully wireless approach for energy supply and readout of the sensor. The energy for the used heating element is harvested from conventional power supply lines. Furthermore, we used a fully passive sensor to measure the pressure value. Both parts together offer a flexible sensor concept which can solve current implementation drawbacks of size and wired connection to this kind of sensors. The presented sensor concept is completely autonomous and offers a cheap and flexible alternative to conventional sensors even on places not easy to access and without the need for maintenance. For the whole sensor system a simulation model is derived and the model is compared to measurements. The accuracy of the model for the autonomous sensor is shown over a large area of pressure.

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Characterization of a SAW-Pirani vacuum sensor for two different operating modes

Cited by 13 publications

References 9 publications

Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)/ZnO Nanocomposites

Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)/ZnO Nanocomposites

Love Wave Sensor with High Penetration Depth for Potential Application in Cell Monitoring

A completely wireless and passive low-pressure sensor

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