Characterization of All Solid State Batteries with LiPON Thin Films Obtained with Different Substrates and RF Sputtering Times

Abstract

All-solid-state lithium batteries consisting of LiPON thin films were prepared by radio-frequency (RF) magnetron sputtering, and the influences of substrates and RF sputtering times have been investigated. For the preparation with different substrates, the Cu, Mo, Al and FTO (SnO 2 : F) were chosen to grow LiPON films, respectively. The results indicate that the small particles of FTO-sub film can aggregate together and form the particles clusters, which contribute to a fairly rough surface and high discharge capacity of the lithium cell during the cycle test. For the preparation with different sputtering times, the 0.5, 1.0, 1.5 and 2.0 hours are taken to evaluate the characteristics and electrochemical properties of the films, respectively. The results show that long sputtering time (1.5 and 2.0 h) could prevent the formation of polycrystalline phases, which may increase the capacity of all-solid-state Li + battery.

Fabrication of a magnesium-ion-conducting magnesium phosphate electrolyte film using atomic layer deposition

“…Extensive research has been conducted on all-solid-state, thin-film ion batteries because they are expected to be used to power micro devices and are more suitable for use in higher temperature environments compared to ion batteries, which use liquid electrolytes. [1][2][3] For the past few decades, much attention has been paid to lithium phosphorous oxynitride, commonly known as LiPON, and its use as a solid-state electrolyte (SSE), because the material exhibits high ionic conductivity, on the order of 10 −6 S cm −1 , at room temperature. 4) Lithium (Li) metal is often used as the negative electrode in thin-film ion batteries.…”