Characterization of AlN and AlScN thin films CPW Transmission on High-Resistive Substrates

Du, Kang; Liu, Fengyu; Xu, Xuankai; Wu, Tao

doi:10.1109/uffc-js60046.2024.10793661

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) 2024

DOI: 10.1109/uffc-js60046.2024.10793661

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Characterization of AlN and AlScN thin films CPW Transmission on High-Resistive Substrates

Kang Du,

Fengyu Liu,

Xuankai Xu

et al.

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Characterization of AlN and AlScN thin films CPW Transmission on High-Resistive Substrates

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References 10 publications

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