Both planar GaN substrates and individual GaN nanowires have been functionalized with
single-stranded DNA, an important process for use of GaN devices for label-free
biosensing. A functional aminopropyltrimethoxysilane layer was deposited on
hydroxylated GaN, as confirmed by XPS. A bifunctional glutaraldehyde layer was then
coupled to the silane, presenting carbonyl groups for subsequent condensation
reaction with amine-terminated, fluorescently labeled DNA. Atomic force and
scanning electron microscopy studies indicated the functional layers are smooth,
uniformly deposited, and at least 20 nm thick on both the planar surfaces and on
individual nanowires. An oxygen plasma treatment was used in conjunction with a
silicone mask to pattern the functionalized surfaces and nanowires. DNA remained
immobilized on the nanowires following their release into suspension via sonication and
dielectrophoretic alignment, demonstrating the potential of this functionalization
chemistry for ‘bottom-up’ fabrication and self-assembly of nanowire sensor arrays.