Characterization of Boron Carbonitride (BCN) Thin Films Deposited by Radiofrequency and Microwave Plasma Enhanced Chemical Vapor Deposition

Abstract

Boron carbonitride (BCN) thin films with a thickness of ~4 µm were synthesized on Si (100) substrate by radiofrequency and microwave plasma enhanced chemical vapor deposition using trimethylamine borane [(CH 3 ) 3 N.BH 3 )] as a molecular precursor. The microstructures of the films were evaluated using field emission scanning electron microscopy (FE-SEM) and X-ray diffractometry (XRD). Fourier transform infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used to analyze the chemical bonding state and composition of the films. It has been observed that the films were adhered well to the silicon substrate even after being broken mechanically. XRD and FE-SEM results showed that the films were x-ray amorphous, rough surface with inhomogeneous microstructure. The micro hardness was measured by nano-indentation tester and was found to be approximately 2~7 GPa.

New emerging rare-earth free yellow emitting 2D BCNO nanophosphor for white light emitting diodes

“…43,44 The broadening observed in the B-N absorption bands can be ascribed to the incorporation of carbon atoms into the host BN lattice. 45 A sharp edge related to the B-C stretching bond is observed at B1240 cm…”

Synthesis and extensive characterisation of phosphorus doped graphite

“…Adventitious contamination with oxygen also causes a significant background oxygen level in samples, as shown by XPS analysis of graphite alone. 36 This makes it difficult to accurately quantify the at.% of O in the sample. XPS analysis shows that surface P 4 O 10 is efficiently removed on washing samples further with acetone (see ESI Figure S3).…”

Dibromocarbene Functionalization of Boron Nitride Nanosheets: Toward Band Gap Manipulation and Nanocomposite Applications

“…This is indicative of N-C bonding and has also been previously noted in literature reports describing sp 2 hybridized bonding between B, C and N atoms. 34,42,53 Analysis of the C1s spectrum for DBC-BNNS also identifies a shoulder peak at 287.2 eV assigned to CBr2 and confirms the bonding of the DBC species to the BNNSs. 54 To support the assertions made above, firstly, identification of both B-C and C-N bonds from the FTIR and XPS analysis implies that mechanism pathway I in Scheme 2b, is precluded, i.e.…”

“…This is assigned to B-C bonding, and has been previously reported for h-BCN hybrid and BCN thin films. 34,42,53 Analysis of the N1s core level spectra for BNNSs indicates a symmetric N1s peak centred at 398.1 eV (Supporting Information, Figure S6b). Analogous to the case of the B1s spectra, the N1s peak for DBC-BNNSs, centred at 398.2 exhibits asymmetric broadening at higher energy, 398.8 eV (Supporting Information, Figure S6b).…”