Thin Solid Films
 1994
DOI: 10.1016/0040-6090(94)90004-3
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Characterization of boron-doped diamond films using (CH4-CO2) gas mixtures with B(OCH3)3 as a dopant source by MPCVD

C.-F. Chen
1
,
Ssu-Han Chen
2
,
Tsao‐Ming Hong
3
et al.
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Cited by 4 publications
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