2008
DOI: 10.1016/j.microrel.2008.05.004
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Characterization of defects in flexible circuits with ultrasonic atomic force microscopy

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Cited by 5 publications
(3 citation statements)
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References 18 publications
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“…这种分类方法可将薄膜缺陷分为杂质缺陷、化学 缺陷、电致缺陷 [11] 、力学键缺陷、热缺陷,结构缺陷 等 [12] [13] 、超声波检测 [14] 、利用磁场来检测以及利用光学 方法来检测等 [15][16][17] 。其中,利用光学方法进行缺陷检 测主要是利用光的以下几个特性:光的散射 [18] 、光的 干涉现象和光的偏振特性等。表 2 是上述各种光学方 法优缺点的比较。 综合光的椭圆偏振特性 [19]…”
Section: 从形成原因分unclassified
“…这种分类方法可将薄膜缺陷分为杂质缺陷、化学 缺陷、电致缺陷 [11] 、力学键缺陷、热缺陷,结构缺陷 等 [12] [13] 、超声波检测 [14] 、利用磁场来检测以及利用光学 方法来检测等 [15][16][17] 。其中,利用光学方法进行缺陷检 测主要是利用光的以下几个特性:光的散射 [18] 、光的 干涉现象和光的偏振特性等。表 2 是上述各种光学方 法优缺点的比较。 综合光的椭圆偏振特性 [19]…”
Section: 从形成原因分unclassified
“…Several new techniques based on AFM have been developed to measure material properties in the nanometer regime. One such technique is ultrasonic force microscopy (UFM), [15][16][17] which is capable of mapping local elastic variations in the material. UFM is based on detecting acoustic displacements of a sample placed on a transducer by an AFM probe.…”
Section: Introductionmentioning
confidence: 99%
“…It has been shown that UFM can be an effective tool in detecting cracks, subsurface cracks, and delaminations in materials. [16][17][18][19] This study focused on the characterization of fracture surfaces in fatigue-tested nickel alloys with a range of grain sizes in an effort to understand the key microstructural features controlling fatigue crack propagation in fine-grained structures. WLIM and the combination of AFM and UFM were used to characterize the fatigue-fractured surfaces of Ni-20 wt pct Cr alloys.…”
Section: Introductionmentioning
confidence: 99%