Characterization of Diamond: Like Carbon Films Synthesized by DC-Plasma Enhanced Chemical Vapor Deposition

Vaghri, Elnaz; Khalaj, Zahra; Ghoranneviss, M.; Borghei, Seyed Majid

doi:10.1007/s10894-011-9406-3

Cited by 27 publications

(8 citation statements)

References 40 publications

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“…The Raman spectra of as grown NCDs on the Si substrate show the three important peaks, as shown in figure 2. The peaks at 1388 and 1571 cm -1 are related to D and G bands (Paul 2008;Hsu et al 2010;Vaghri et al 2011;Huang et al 2012). Whereas the D band for the NCD deposited on the Si substrate appeared at a low wavenumber at 1345 cm -1 , also the G peak position shifted to a lower wavenumber at 1517 cm -1 .…”

Section: Resultsmentioning

confidence: 98%

“…SiC nanomaterials have been successfully synthesized using a number of methods including decomposition of organic silicon compounds, high temperature reactions between carbon nanotubes and SiO, arc-discharge processes, hot filament chemical vapour deposition and lowtemperature, atmospheric microplasma deposition (Zhou et al 2000;Xu et al 2005;Wang 2007;Qamar et al 2011;Vaghri et al 2011). In addition, these techniques are very complex, slow and harmful because of the use of the highly toxic precursor, silane.…”

Section: Introductionmentioning

confidence: 99%

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Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

et al. 2014

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A sample and scalable synthetic strategy was developed for the fabrication of nanocrystalline SiC (nc-SiC) thin film. Thin sheet of nanocrystalline diamond was deposited on Si substrate by hot filamentassisted plasma-enhanced chemical vapour deposition system (HF-PECVD). Further, the resulting carbonbased sheet was heated at 1200 °C to allow a solid state reaction between C and Si substrate to form the SiC thin films. The synthesized films mainly consist of β-SiC nanowires with diameters of about 50 nm and tens of micrometers long. The nanowires axes lie along the [1 1 1] direction and possess a high density of planar defects. The β-SiC nanowires thin films exhibit the strong photoluminescence (PL) peak at a wavelength of 400 nm, which is significantly shifted to the blue compared with the reported PL results of SiC materials. The blue shift may be ascribed to morphology, quantum size confinement effects of the nanomaterials and abundant structure defects that existed in the nanowires.

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Section: Resultsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

et al. 2014

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“…The increase in relative intensity of the Ag diffraction peaks in ratio of Ar/CH 4 1 : 2 can be attributed to the increase of amount of silver nanoparticles sputtered on substrate in ratio of Ar/CH 4 1 : 2 which may result in the increase in diffracted photon counts if X-Ray can still penetrate up to the increased depth of silver crystalline layer. The average crystallite size is estimated using Scherer formula [21]:…”

Section: Xrd Resultsmentioning

confidence: 99%

“…The Ag/C:H thin films are prepared by DC sputtering. A detail of this system has been reported in [21]. The glow discharge was powered by DC power supply in regime of constant current.…”

Section: Methodsmentioning

confidence: 99%

“…Also silver nanoparticles have been produced using different methods such as electrochemical method [13][14][15], thermal decomposition [16], laser ablation [17], microwave irradiation [18,19] and sonochemical synthesis [20]. Recently, Vaghri et al reported different properties of Cu/C:H and Ag/C:H 2 Advances in Materials Science and Engineering [21]. Their results showed that properties of the films depend on the volume fraction ratio of the metallic phase in a composite and on the shape and size of inclusions.…”

Section: Introductionmentioning

confidence: 99%

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Effect of Ar/CH₄Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering

Soltani¹,

Ghorannevis²,

Shirazi³

2013

Advances in Materials Science and Engineering

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Ag/C:H films were deposited by DC sputtering method on Si substrates with different Ar/CH4gas mixture ratios. Effect of Ar/CH4gas mixture ratios was investigated on optical and structural properties of Ag/C:H films by FTIR spectroscopy analysis, X-Ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM), respectively. In order to evaluate the effect of gas flow ratio on the optical and structural properties of Ag/C:H films, Ar/CH4gas ratio was changed by keeping the Ar flow rate constant while varying the CH4gas flow rate (2, 5, and 10 SCCM). From FTIR analysis it was observed that increase in the Ar/CH4gas ratio results in decreasing the sputtered Ag nanoparticles and increasing of C–H bonds. Also from XRD pattern it was found that intensity of Ag crystalline plane and average grain size decrease by adding CH4to working gas admixture. From SEM and AFM micrographs, size of the grains also became smaller on the surface of the films, which will lead to decreasing the roughness of the deposited thin films.

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Diamond and Diamond-Like Carbon

Khalaj

Ghoranneviss

Vaghri

et al. 2013

Diamond and Related Nanostructures

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Characterization of Diamond: Like Carbon Films Synthesized by DC-Plasma Enhanced Chemical Vapor Deposition

Cited by 27 publications

References 40 publications

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

Effect of Ar/CH₄Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering

Diamond and Diamond-Like Carbon

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Characterization of Diamond: Like Carbon Films Synthesized by DC-Plasma Enhanced Chemical Vapor Deposition

Cited by 27 publications

References 40 publications

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

Synthesis and photoluminescence property of silicon carbide nanowires thin film by HF-PECVD system

Effect of Ar/CH4Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering

Diamond and Diamond-Like Carbon

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Effect of Ar/CH₄Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering