Characterization of ferroelectric BST MIM capacitors up to 65 GHz for a compact phase shifter at 60 GHz

Paolis, Rosa De; Coccetti, Fabio; Payan, Sandrine; Maglione, Mario; Guégan, Guillaume

doi:10.1109/eumc.2014.6986478

Cited by 23 publications

(16 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…In this case, the inductance is around 0.026 nH, and this value remains rather constant over the entire bias range. As for the resistance value, it is 1.1, 1.5, and 1.8 , respectively, at 0, 10, and 20 V. The variation of the resistance value with the applied voltage can be explained by assumption that is composed by a metal loss and a dielectric loss (which increases with field in a quasi-Debye loss mechanism) [9], [14]. The capacitance value is 1.32 pF at 0 V and decreases down to 0.25 pF at 20 V (corresponding to 1000 kV/cm).…”

Section: B Ec Modeling and Wideband Parameters Extractionmentioning

confidence: 99%

“…2(b). The experimental procedure adopted in [14] was carried out to efficiently extract the device parameters up to 67 GHz, such as capacitance value, permittivity, tunability, and -factor. A fitting of measurement data to an EC model has been achieved for this aim.…”

Section: High-tunable and -Factor Enhanced Capacitors: Design Anmentioning

confidence: 99%

“…The fitting of measurement data to an RLC EC is very accurate over the entire frequency range (from 40 MHz to 67 GHz) and over the whole applied bias range (0-20 V), taking advantage of previous investigations [14], [15], which accounted for the complex parasitic effects introduced by the planar integration. An example is shown in Fig.…”

Section: B Ec Modeling and Wideband Parameters Extractionmentioning

confidence: 99%

“…By means of the accurate fitting method reported in [14], an equivalent circuit (EC) model has been used to supply a wideband material parameters extraction procedure working up to millimeter-wave frequencies. In this work, three key aspects have then been developed in order to maximize tunability and quality factor ( -factor) conditions, which are an oriented analysis at material level, a focused design of experiment on the capacitor geometry, and an innovative capacitor architecture.…”

mentioning

confidence: 99%

“…As for the phase shifter, the evolution of past work [14] is presented in this study. It represents a more compact implementation based on different capacitor designs, as will be seen from their comparison.…”

mentioning

confidence: 99%

See 4 more Smart Citations

High-Tunability and High-<formula formulatype="inline"><tex Notation="TeX">$Q$</tex></formula>-Factor Integrated Ferroelectric Circuits up to Millimeter Waves

Paolis

Payan

Maglione

et al. 2015

IEEE Trans. Microwave Theory Techn.

Self Cite

View full text Add to dashboard Cite

Based on advanced industrial fabrication processes and on specialized design strategies, a new class of ferroelectric metal-insulator-metal (MIM) capacitors with high tunability and high quality factor ( -factor) is here presented. Modeled by means of lumped element equivalent circuits and experimentally validated up to 67 GHz, a maximum tunability of 81% (0-20-V bias), and a -factor improvement up to 30% (at 0 V) could be demonstrated at 1 GHz. These varactors have been exploited in the design of reconfigurable filters, with a center frequency at around 1 GHz that can be tuned up to 112%, and a figure of merit (FoM) per applied bias better than 31.5 dB kV. Owing to their promising features, these materials have been exploited to design small-size capacitors suitable for millimeter-wave frequencies. The results demonstrate tunabilities and FoMs superior to the state-of-the-art. Based on this, two 60-GHz tunable phase shifters are proposed. They represent the first example of such devices based on MIM Ba,Sr TiO (BST) capacitors. In terms of insertion loss, size, FoM, and FoM per bias they show a remarkable improvement with respect to the state-of-the-art of ferroelectric-based devices, thus proving that the BST represents a promising candidate to operate into the millimeter frequency band.

show abstract

Section: B Ec Modeling and Wideband Parameters Extractionmentioning

confidence: 99%

Section: High-tunable and -Factor Enhanced Capacitors: Design Anmentioning

confidence: 99%

Section: B Ec Modeling and Wideband Parameters Extractionmentioning

confidence: 99%

mentioning

confidence: 99%

mentioning

confidence: 99%

See 3 more Smart Citations