Characterization of focused electron beam induced carbon deposits from organic precursors

Bret, T.; Mauron, Sebastien; Utke, Ivo; Hoffmann, P.

doi:10.1016/j.mee.2005.01.006

Cited by 60 publications

(62 citation statements)

References 36 publications

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“…Surprisingly, the EDX, ERDA, and FTIR measurements show that the deposits from the purely organic precursors are all chemically very similar. 86,178 The composition is C 9 H 2 O ͑regardless of the stoichiometric composition of the precursor͒ and 90%-95% of the carbon is sp 2 bonded ͑C-C͒ and 5%-10% is sp 3 bonded ͑C-H͒. The micro-Raman measurements indicate that the carbon deposits consist of nanocrystalline graphite with cluster sizes around 2 nm.…”

Section: B Precursor Gas Onlymentioning

confidence: 99%

“…With a similar precursor flux reaching the irradiated area, acrylic acid has a five times higher growth rate than styrene. 178 This is most likely due to the longer residence times of the acrylic acid molecules on the adsorption sites, which means that its sticking coefficient is higher. This is caused by the fact that acrylic acid is a polar molecule and can form H bonds, interactions that are much stronger than the van der Waals forces for styrene.…”

Section: B Precursor Gas Onlymentioning

confidence: 99%

“…Another difference is the deposit smoothness. While most of the precursors yield a smooth deposit, the deposits from formic acid are sometimes ͑and not reproducibly͒ rough and have a hollow structure 178 ͑see Fig. 49͒.…”

Section: B Precursor Gas Onlymentioning

confidence: 99%

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A critical literature review of focused electron beam induced deposition

Dorp

Hagen

2008

Journal of Applied Physics

486

577

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An extensive review is given of the results from literature on electron beam induced deposition. Electron beam induced deposition is a complex process, where many and often mutually dependent factors are involved. The process has been studied by many over many years in many different experimental setups, so it is not surprising that there is a great variety of experimental results. To come to a better understanding of the process, it is important to see to which extent the experimental results are consistent with each other and with the existing model. All results from literature were categorized by sorting the data according to the specific parameter that was varied ͑current density, acceleration voltage, scan patterns, etc.͒. Each of these parameters can have an effect on the final deposit properties, such as the physical dimensions, the composition, the morphology, or the conductivity. For each parameter-property combination, the available data are discussed and ͑as far as possible͒ interpreted. By combining models for electron scattering in a solid, two different growth regimes, and electron beam induced heating, the majority of the experimental results were explained qualitatively. This indicates that the physical processes are well understood, although quantitatively speaking the models can still be improved. The review makes clear that several major issues remain. One issue encountered when interpreting results from literature is the lack of data. Often, important parameters ͑such as the local precursor pressure͒ are not reported, which can complicate interpretation of the results. Another issue is the fact that the cross section for electron induced dissociation is unknown. In a number of cases, a correlation between the vertical growth rate and the secondary electron yield was found, which suggests that the secondary electrons dominate the dissociation rather than the primary electrons. Conclusive evidence for this hypothesis has not been found. Finally, there is a limited understanding of the mechanism of electron induced precursor dissociation. In many cases, the deposit composition is not directly dependent on the stoichiometric composition of the precursor and the electron induced decomposition paths can be very different from those expected from calculations or thermal decomposition. The dissociation mechanism is one of the key factors determining the purity of the deposits and a better understanding of this process will help develop electron beam induced deposition into a viable nanofabrication technique.

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Section: B Precursor Gas Onlymentioning

confidence: 99%

Section: B Precursor Gas Onlymentioning

confidence: 99%

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A critical literature review of focused electron beam induced deposition

Dorp

Hagen

2008

Journal of Applied Physics

486

577

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“…Examples of materials deposited with FEBIP are metals such as gold, platinum, tungsten, copper, iron, rhodium, and nickel, as well as nonmetals such as carbon, carbon nitride, and silicon dioxide. [4][5][6][7][8][9][10][11][12][13][14] FEBIP deposited structures have potential medicinal, industrial, and research applications as sensors, catalysts, nanowires, nanoelectronic components, and as high aspect ratio scanning probe tips. 8,[15][16][17][18][19][20][21][22][23][24] Typical FEBIP precursors used to deposit metallic nanostructures are organometallic molecules possessing carbonyl or alkyl ligands, which are chosen on the basis of their relatively high vapor pressures at room temperature.…”

Section: Introductionmentioning

confidence: 99%

Electron beam irradiation of dimethyl-(acetylacetonate) gold(III) adsorbed onto solid substrates

Wnuk

Gorham

Rosenberg

et al. 2010

Journal of Applied Physics

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Electron beam induced deposition of organometallic precursors has emerged as an effective and versatile method for creating two-dimensional and three-dimensional metal-containing nanostructures. However, to improve the properties and optimize the chemical composition of nanostructures deposited in this way, the electron stimulated decomposition of the organometallic precursors must be better understood. To address this issue, we have employed an ultrahigh vacuum-surface science approach to study the electron induced reactions of dimethyl-͑acetylacetonate͒ gold͑III͒ ͓Au III ͑acac͒Me 2 ͔ adsorbed onto solid substrates. Using thin molecular films adsorbed onto cooled substrates, surface reactions, reaction kinetics, and gas phase products were studied in the incident energy regime between 40 and 1500 eV using a combination of x-ray photoelectron spectroscopy ͑XPS͒, reflection absorption infrared spectroscopy ͑RAIRS͒, and mass spectrometry ͑MS͒. XPS and RAIRS data indicate that electron irradiation of Au III ͑acac͒Me 2 is accompanied by the reduction in Au III to a metallic Au 0 species embedded in a dehydrogenated carbon matrix, while MS reveals the concomitant evolution of methane, ethane, carbon monoxide, and hydrogen. The electron stimulated decomposition of Au III ͑acac͒Me 2 is first-order with respect to the surface coverage of the organometallic precursor, and exhibits a rate constant that is proportional to the electron flux. At an incident electron energy of 520 eV, the total reaction cross section was Ϸ3.6ϫ 10 −16 cm 2 . As a function of the incident electron energy, the maximum deposition yield was observed at Ϸ175 eV. The structure of discrete Au-containing deposits formed at room temperature by rastering an electron beam across a highly ordered pyrolytic graphite substrate in the presence of a constant partial pressure of Au III ͑acac͒Me 2 was also investigated by atomic force microscopy.

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“…It has been known that the surface of the organic materials is damaged by electron beams and that amorphous carbon films build up where the electron beams impinge by way of various carbon contaminants including oils, gasket materials, and other residual gases in the common SEM system (e.g., Knox 1976;Bret et al 2005). To minimize the damage and organic contamination, the SEM analysis of ESCuC was performed at lower electron energy (10 keV) under approximately 60 Pa N 2 atmosphere using the dry (i.e., oil-free) pumping system.…”

Section: Alteration and Contamination During Sample Preparationmentioning

confidence: 99%

ToF-SIMS analysis of carbonaceous particles in the sample catcher of the Hayabusa spacecraft

et al. 2015

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Three carbonaceous category 3 particles (RA-QD02-0180, RB-QD04-0037-01, and RB-QD04-0047-02) returned in the sample catcher from the Hayabusa spacecraft were analyzed by time of flight-secondary ion mass spectrometry (ToF-SIMS) to establish an analytical procedure for determination of their origins. By the different analytical schemes, the three particles gave distinct elemental and molecular ions, in which the organic carbons commonly appear to be associated with nitrogen, silicon, and/or fluorine. The particles could be debris of silicon rubber and fluorinated compounds and are therefore man-made artifacts rather than natural organic matter.

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Characterization of focused electron beam induced carbon deposits from organic precursors

Cited by 60 publications

References 36 publications

A critical literature review of focused electron beam induced deposition

A critical literature review of focused electron beam induced deposition

Electron beam irradiation of dimethyl-(acetylacetonate) gold(III) adsorbed onto solid substrates

ToF-SIMS analysis of carbonaceous particles in the sample catcher of the Hayabusa spacecraft

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