2023
DOI: 10.1088/1361-6501/acb6e4
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Characterization of higher-order resonant cantilevers for density determination in different flowing liquids

Abstract: This study investigates the sensing characteristics of micromachined electromagnetic cantilevers vibrating at different resonance orders and under static or flowing liquid immersions. The cantilever is designed with a wide-plate structure, which contributes to the modal optimization for basic and higher-order torsions. The fluid-structure interaction is used to analyze the parameterized expressions of the density and its changing sensitivity based on the cantilever's flexural and torsional vibrations. They hav… Show more

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