We
investigate the impact of the aluminum-doped zinc oxide (AZO)
as an ecofriendly bottom electrode for ZnO nanowire-based mechanical
energy transducers. The AZO electrode is grown using atomic layer
deposition, followed by the growth of ZnO nanowires (NWs) using pulsed-liquid
injection metal–organic chemical vapor deposition. The Al dopant
concentration is varied to obtain AZO thin films with different morphologies,
structural orientations, and electrical properties. Depending on the
AZO thin film used as the growth platform, the ZnO NW arrays can have
a random or vertical alignment. This in turn affects their piezoelectric
performance analyzed by piezoresponse force microscopy. Interestingly,
the piezoelectric coefficient d
33 of ZnO
NWs grown on the AZO thin films (4.6–5.4 pm/V) is higher compared
to those grown directly on the heavily doped Si substrate (3–3.8
pm/V) with a similar electrical resistivity. The average optical transmittance
of a quartz substrate/AZO thin film/ZnO NW structure is found to be
81.2% in the wavelength range of 400–700 nm. The structural
and piezoelectric properties of ZnO NWs and their correlation with
the AZO thin films used as growth platforms are discussed in detail
and open some perspectives to fabricate transparent piezoelectric
devices using ecofriendly materials and scaled-up chemical deposition
techniques compatible with industrial requirements.