2023
DOI: 10.1002/adem.202301432
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Characterization of In‐Plane Piezoelectric Strain of Ferroelectric Thin Films by the Magnetoelectric Coupling Effect

Mengmeng Guan,
Jiaxuan Zhang,
Haowen Tang
et al.

Abstract: Piezoelectric response of the ferroelectric/piezoelectric thin films is crucial for actuation of micro‐electromechanical systems (MEMS) devices as well as strain‐mediated electronic devices. Among many piezoelectric modes, longitudinal and transverse piezostrain is the most widely used. Various methods have been well established for quantitative characterization of the longitudinal piezostrain, such as laser interferometer and piezoelectric force microscopy. However, it is still a great challenge to characteri… Show more

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