Abstract. Element distribution maps obtained on electron microprobes via the beam scan method with wavelength-dispersive spectrometers reveal a defocusing effect if they are taken at sufficiently small magnification. This effect, which occurs where the Bragg condition of the spectrometer is not adequately met, can be avoided or corrected by various methods. A method is presented here to correct defocused element distribution maps with the help of corresponding maps obtained on homogeneous standards.Key word~ electron probe microanalysis, element distribution mapping. Element distribution mapping, or quantitative compositional mapping 1-1], constitutes an important aspect of electron probe microanalysis [2,3,4] since element distribution maps afford a graphical representation of the lateral distribution of elements on the surface of materials. By 'surface' we mean a layer of thickness ~< 1 micrometer. This is of great interest in many areas of science and engineering, such as materials science, geology, and even atmospheric science, e.g., in the characterization of aerosols [5].There are two basic methods to generate an element distribution map, the beam scan method and the stage scan method. In the beam scan method, the electron beam is scanned across a rectangular region of the sample surface. In the stage scan method, on the other hand, the beam remains stationary while the sample is moved perpendicular to the beam. In both cases the beam electrons cause emission of X-rays in the sample. These X-rays can be analyzed with the help of energydispersive or wavelength-dispersive spectrometers. Based on the results of that analysis, a map can be