“…Apart from doping, several studied have been reported that the synthesis method under specific conditions affecting the properties of the films and could enhanced their properties [7]. To date, variant synthesis method has been used to grow the ZnO films namely, sputtering [8], co-precipitation [9], spin coating [10], hydrothermal [11], MBE [12], spray pyrolysis [13], and chemical bath deposition (CBD) [14]. Among those synthesis methods, sputtering method is more attractive due to its value of low processing temperature, flexibility in control the dopant concentration, and able to develop good quality of film in a large area of substrate which is good for mass-produce especially for industrial applications.…”