Optical Interference Coatings 1992
DOI: 10.1364/oic.1992.othe8
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Characterization of Inhomogeneous and Absorbing Thin Films by Combined Spectroscopic Ellipsometry/ Reflection, and Transmission Measurements

B. Johs
1
,
D. Meyer
2
,
John A. Woollam
3
et al.

Abstract: Optical constants and film structure of inhomogeneous and absorbing thin films are characterized by a combined analysis of spectroscopic ellipsometry, transmission and reflection data.

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