Abstract. In this work a laser-produced plasma (LPP) source was used to create low temperature plasmas. An extreme ultraviolet and soft X-ray (EUV/SXR) radiation pulse was used for ionization of molecular gases, injected into a vacuum chamber synchronously with the EUV/SXR pulse. Energies of photons exceeding 100 eV were sufficient for dissociative ionization, ionization of atoms or even ions. The resulting photoelectrons had also enough energy for further ionizations or excitations. Time resolved UV/VIS spectra, corresponding to single charged ions, molecules and molecular ions, were recorded. For spectral lines, corresponding to radiative transitions in F II and S II ions, electron temperature was calculated based on a Boltzmann plot method. Numerical simulations of the molecular spectra were fitted to the experimental spectra allowing for determination of vibrational and rotational temperatures.