Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors

Lee, Jungchul; Naeli, Kianoush; Hunter, Hanif; Berg, John C.; Wright, Tanya L.; Courcimault, Christophe; Naik, Nisarga; Allen, Mark G.; Brand, Oliver; Glezer, Ari; King, William P.

doi:10.1016/j.sna.2006.05.014

Cited by 15 publications

(7 citation statements)

References 33 publications

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“…Baselt et al reviewed micromachined biosensors and demonstrated the use of piezoresistive AFM cantilevers for the study of interactions between biomolecules and chemical sensors [210]. Piezoresistive cantilevers have also been used for materials characterization [220]–[222], liquid or gas flow velocity sensing [223], [224] and data storage applications [225]–[227]. However, researchers have found that thermal-based cantilevers perform better (more than one order of magnitude) in terms of sensitivity and resolution for data storage applications compared to the piezoresistive cantilevers [228]–[230].…”

Section: Devices and Applicationsmentioning

confidence: 99%

Review: Semiconductor Piezoresistance for Microsystems

et al. 2009

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Piezoresistive sensors are among the earliest micromachined silicon devices. The need for smaller, less expensive, higher performance sensors helped drive early micromachining technology, a precursor to microsystems or microelectromechanical systems (MEMS). The effect of stress on doped silicon and germanium has been known since the work of Smith at Bell Laboratories in 1954. Since then, researchers have extensively reported on microscale, piezoresistive strain gauges, pressure sensors, accelerometers, and cantilever force/displacement sensors, including many commercially successful devices. In this paper, we review the history of piezoresistance, its physics and related fabrication techniques. We also discuss electrical noise in piezoresistors, device examples and design considerations, and alternative materials. This paper provides a comprehensive overview of integrated piezoresistor technology with an introduction to the physics of piezoresistivity, process and material selection and design guidance useful to researchers and device engineers.

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Section: Devices and Applicationsmentioning

confidence: 99%

Review: Semiconductor Piezoresistance for Microsystems

et al. 2009

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“…In fact piezoresistive physical cantilever sensors are a specific case of piezoresistive MEMS sensors [21]. Two particular examples may be the measurement of air flow velocity in small diameter (7 mm) pipes [108] and the characterisation of the properties of liquid and gaseous micro-and nanojets generated by microfabricated nozzles with diameters ranging from 1 to 12 lm [109].…”

Section: Nanomechanical Sensors For Physical and (Bio)chemical Measurmentioning

confidence: 99%

Piezoresistive cantilevers for nanomechanical sensing

Bausells

2015

Microelectronic Engineering

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“…156,157 Microcantilevers with integrated resistive heaterthermometers have also been used as a metrology tool to investigate convective heat flow in microscale jet flows. 158,159 By modulating the heating and cooling of the microheater, a full boiling curve for the hydrocarbon microjets was constructed.…”

Section: Measurements With Heated Cantileversmentioning

confidence: 99%

Heated Atomic Force Microscope Cantilevers and Their Applications

King

Bhatia

Felts

et al. 2013

Annual Rev Heat Transfer

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Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale heat flow measurements, materials characterization, nanomanufacturing, and many other applications. When a heated AFM cantilever tip is in contact with a substrate, the interface is a nanometer-scale hotspot whose temperature can be controlled over a large temperature range. Over the past decade, there has been significant improvements in the understanding of heat flows within and from a heated an AFM cantilever. There have also been improvements in the characterization and calibration of these heated AFM cantilevers. These advancements have led to new heated AFM cantilever designs and have enabled new applications of heated AFM cantilevers. This chapter describes research into heat transfer fundamentals, cantilever technology, and applications of heated AFM cantilevers.

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Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors

Cited by 15 publications

References 33 publications

Review: Semiconductor Piezoresistance for Microsystems

Review: Semiconductor Piezoresistance for Microsystems

Piezoresistive cantilevers for nanomechanical sensing

Heated Atomic Force Microscope Cantilevers and Their Applications

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