2017
DOI: 10.1016/j.surfcoat.2017.08.038
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Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings

Abstract: The influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiN x and CrAlSiO y N x coatings has been studied. The partial pressure of nitrogen reactive gas was varied from 0.037 Pa to 0.15 Pa for CrAlSiN x films, and the N 2 /O 2 (85%:15%) partial pressure was varied from 0.046 Pa to 0.21 Pa for CrAlSiO y N x layers. Transmittance and reflectance of samples were measured and were modeled to obtain the spectral optical constants… Show more

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Cited by 22 publications
(2 citation statements)
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“…as also confirmed by X-ray diffraction (XRD), as already reported [11]. Remaining layers are amorphous and reveal a featureless morphology as shown by single layers studied previously [16]. The final design shows simultaneously high solar absorbance in average α= 95.2 % and low emissivity ε= 9.8 % (calculated for 400 ºC).…”
Section: Methodssupporting
confidence: 81%
See 1 more Smart Citation
“…as also confirmed by X-ray diffraction (XRD), as already reported [11]. Remaining layers are amorphous and reveal a featureless morphology as shown by single layers studied previously [16]. The final design shows simultaneously high solar absorbance in average α= 95.2 % and low emissivity ε= 9.8 % (calculated for 400 ºC).…”
Section: Methodssupporting
confidence: 81%
“…These changes were seen after the first vacuum annealing step (50 h) but no significant further changes were found with subsequent anneling steps until 650 h. As a result, the values of solar absorptance and emittance show a very small variation due to that shift. Small changes after annealing can be related to the oxidation of some Si atoms, or it can be related to the diffusion of layer elements (such as the diffusion of Cr CrAlSiN x O y layers are substoichiometric in terms of (N+O)/(Cr+Al+Si) atomic ratio [16], which means that some of Cr atoms are in metallic oxidation state [16], because Cr are less reactive than Al and Si, and can diffuse towards the surface. The substoichiometry of those layers are due to required optical properties of HA and LA layers.…”
Section: Thermal Stabilitymentioning
confidence: 99%