Characterization of materials using the secondary electron energy spectromicroscopy technique

Srinivasan, Anand; Han, Weiding; Zheng, Minrui; Khursheed, Anjam

doi:10.1016/j.omx.2021.100121

Optical Materials: X

2021

DOI: 10.1016/j.omx.2021.100121

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Characterization of materials using the secondary electron energy spectromicroscopy technique

Anand Srinivasan¹,

Weiding Han²,

Minrui Zheng³

et al.

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2024

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Cited by 1 publication

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Resolving the Electron Plume within a Scanning Electron Microscope

Alcorn,

Perez,

Smoll

et al. 2024

ACS Nano

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Scanning electron microscopy (SEM), a centuryold technique, is today a ubiquitous method of imaging the surface of nanostructures. However, most SEM detectors simply count the number of secondary electrons from a material of interest, and thereby overlook the rich material information contained within them. Here, by simple modifications to a standard SEM tool, we resolve the momentum and energy information on secondary electrons by directly imaging the electron plume generated by the electron beam of the SEM. Leveraging these spectroscopic imaging capabilities, our technique is able to image lateral electric fields across a prototypical silicon p−n junctions and to distinguish differently doped regions, even when buried beyond depths typically accessible by SEM. Intriguingly, the subsurface sensitivity of this technique reveals unexpectedly strong surface band bending within nominally passivated semiconductor structures, providing useful insights for complex layered component designs, in which interfacial dynamics dictate device operation. These capabilities for noninvasive, multimodal probing of complicated electronic components are crucial in today's electronic manufacturing but is largely inaccessible even with sophisticated techniques. These results show that seemingly simple SEM can be extended to probe complex and useful material properties.

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Resolving the Electron Plume within a Scanning Electron Microscope

Alcorn,

Perez,

Smoll

et al. 2024

ACS Nano

View full text Add to dashboard Cite

show abstract

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Characterization of materials using the secondary electron energy spectromicroscopy technique

Cited by 1 publication

References 21 publications

Resolving the Electron Plume within a Scanning Electron Microscope

Resolving the Electron Plume within a Scanning Electron Microscope

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