Characterization of Mechanical Properties of Thin Polymer Films using Scanning Probe Microscopy

Xu, Jiahui; Hooker, J.R.; Adhihmetty, I.; Padmanabhan, Paddy; Chen, W.

doi:10.1557/proc-522-217

MRS Proc.

1998

DOI: 10.1557/proc-522-217

|View full text |Cite

Characterization of Mechanical Properties of Thin Polymer Films using Scanning Probe Microscopy

Jiahui Xu

J.R. Hooker

I. Adhihmetty

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2017

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

(1 citation statement)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Among the most studied techniques, e.g. surface acoustic wave spectroscopy (SAWS), 14 scanning probe microscopy(SPM), 15 ellipsometric porosimetry (EP), 16,17 Brillouin light scattering (BLS), 18 straininduced elastic buckling instability (SIEBIMM), 19 and plain-strain bulge test, 20 nanoindentation (NI) is readily accessible and widely adopted. Nevertheless, accurate measurement of the elastic modulus in ultrathin porous films by probe-based techniques remains a challenge.…”

mentioning

confidence: 99%

Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects

Lionti

Virwani

Volksen

et al. 2017

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

Historically, the integration of insulators with decreasing dielectric constants, k, has been critical in improving devices performance. The most efficient approach to decrease k is by introducing porosity. Since porosity directly impacts the Young's modulus, the accurate determination of the mechanical properties of porous dielectrics is essential in enabling their implementation into state-of-the-art devices. Currently, nanoindentation is the technique of choice, but as technology relevant thicknesses of dielectrics keep decreasing, substrate effects are unavoidably encountered. These issues have so far been circumvented by measuring bulk materials instead of their thin-film counterparts. This approach is, however, less than ideal as physical properties can be size-dependent. Moreover, pores densification also occurs, potentially leading to overestimated Young's modulus values. In this paper, we define a novel protocol based on ultra-low load, quasi-static nanoindentation to measure mechanical properties of porous thin-films as a function of porosity (0-60%) and thickness (150-700 nm). We could isolate materials densification from substrate effect, and we demonstrated that the former can be accounted for, while the latter does not happen until indentation depths are remarkably higher than the traditionally accepted indentation limit of 10% of the film thickness. Consequently, extremely accurate mechanical characterization of porous low-k thin-films is now possible.

show abstract

mentioning

confidence: 99%

Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects

Lionti

Virwani

Volksen

et al. 2017

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Characterization of Mechanical Properties of Thin Polymer Films using Scanning Probe Microscopy

Cited by 1 publication

References 7 publications

Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects

Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects

Contact Info

Product

Resources

About