Characterization of mechanical properties of thin films using nanoindentation test

Pelletier, Hervé; Krier, Joël; Mille, Pierre

doi:10.1016/j.mechmat.2006.02.011

Cited by 73 publications

(34 citation statements)

References 30 publications

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“…5 Depending upon the conjugate film with substrate, the effects of their mechanical properties tend to establish a critical ratio between maximum penetration depth (h max ) and film thickness (l), so that the substrate does not interfere in the assessment of film properties. [13][14] On the other hand, determining film thickness becomes difficult due to the need for specific instruments and costly, protracted tests, such as scanning electron microscopy (SEM) and Calowear testing, in addition to instrumented indentation testing. [15][16] Accordingly, the present study used the Finite Element Method (FEM) to simulate the indentation testing in a conjugate composed of Titanium Nitride (TiN) film deposited by plasma processing onto a tool Steel (M2).…”

Section: 12mentioning

confidence: 99%

Determination of Film Thickness Through Simulation of Vickers Hardness Testing

2017

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In recent decades, changes in the surface properties of materials have been used to improve their tribology characteristics. However, this improvement depends on the process, treatment time and, essentially, the thickness of this surface film layer. Physical vapor deposition (PVD) has been used to increase the surface hardness of metallic materials. The aim of the present study was to propose a numerical-experimental method to assess the thickness (l) of films deposited by PVD. To reach this objective, Vickers experimental hardness data (H V ) assays were combined with numerical simulation to study the behavior of this property as a function of maximum penetration depth of the indenter (h max ) into the film/substrate conjugate. A strategy was developed to combine the numerical results of the H x h max /l curve with Vickers experimental hardness data (H V ). This methodology was applied to a TiNcoated M2 tool steel conjugate. The mechanical properties of the studied materials were also determined. The thickness results calculated for this conjugate were compatible with their experimental data.

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Section: 12mentioning

confidence: 99%

Determination of Film Thickness Through Simulation of Vickers Hardness Testing

2017

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“…Such a combination of a keen wedge blade and a flexible underlay is supposed to be empirically used in several fields. Pelletie et al (9) has studied determining the mechanical properties of thin films on substrate with a rigid indenter loaded for a nano-indentation test. This report is useful for understanding the influence of the Young's modulus ratio and the yielding stress ratio of a worksheet with a substrate.…”

Section: Introductionmentioning

confidence: 99%

Effect of Underlay Stiffness on Cutting Profile of Polycarbonate Sheet during Wedge Indentation Process

Mitsomwang

Nagasawa

Chaijit³

et al. 2012

JAMDSM

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This paper reports on the cutting characteristics of a polycarbonate (PC) sheet stacked on a flexible underlay by a wedge indentation. In order to investigate the effect of underlay stiffness on sheared profile of PC sheet, the stiffness ratio k r in the thickness direction was varied. Indentation of a 42° center bevel blade into a 0.5mm thickness PC sheet that was stacked on the flexible underlay was carried out experimentally and numerically. Deformation profile of wedged PC sheet was observed by a CCD camera in order to reveal the effect of underlay on the cutting performance of the PC sheet. On the experimental works, it was found that the underlay mechanical properties affected the cutting load response and deformation features of the PC sheet. To discuss the effect of underlay stiffness on the deformation profile of the PC sheet, a finite element method (FEM) analysis with elasto-plastic model was conducted. Through the experiment and FEM simulation, it was revealed that the deformation profile of wedged PC sheet was remarkably related to the bent-up angle of the PC sheet, which was mainly caused by sinking and lateral elongation of the underlay. Moreover, in order to obtain a smart profile of the PC sheet, the stiffness ratio k r must be chosen in a suitable range.

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“…[1][2][3][4][5] Various methods have been proposed for determining the mechanical properties of thin film systems and observing their microstructural evolution. [6][7][8][9] Previous studies have reported that nanoindentation prompts a phase transformation within the indented zone, and therefore has a significant effect upon the load-displacement response of the film. 10,11) Furthermore, for thin films deposited on a silicon substrate, various forms of silicide phase are formed at the film/ substrate interface during substrate annealing.…”

Section: Introductionmentioning

confidence: 99%