Characterization of micro-contact properties using a novel micromachined apparatus

Abstract

This study demonstrated a micromachined testing device consisting of two chips to characterize the micro-contact properties, such as the contact force, the contact resistance and the contact surface roughness, of metal thin films. The testing device was designed to remove the parasitic resistance during the measurement. In addition, the two chips of the testing device can be disassembled and reassembled ; the interfacial properties can be quantified at different contact cycles. Thus, both the qualitative and quantitative relationships between the interfacial properties and the contact resistance can then be investigated. To demonstrate the feasibility of the present apparatus, the contact characteristics of evaporated Al films were characterized at different contact forces and cycles. Potential applications of the present apparatus included the performance enhancement for RF-MEMS switches, micro-connectors and micro-probes.

Contact Conductance Quantization in a MEMS Switch

“…In our setup the actuation of the MEMS switch described before is performed by applying a controlled force to the center of the free beam extremity with the diamond tip of a commercial nanoindenter apparatus (XP model, MTS, Oak Ridge , TN). Because of its very precise displacement and controlled force, the use of a nano-indenter apparatus is very useful to actuate MEMS structures and well adapted to the study of micro-contacts [15][16][17][18]. Upon actuation, the beam is brought into contact with the signal line, allowing the current to flow through it.…”