Characterization of MOEMS devices for the instrumentation of next generation space telescope

Space evaluation of a MOEMs device for space instrumentation

“…The Laboratoire d'Astrophysique de Marseille has over the last few years developed an expertise in the characterization of micro-optical components [7,8,9]. This expertise in small-scale surface deformation characterization of micro-optical components as well as operational testing of MOEMS components has been used for developing a dedicated cold temperature test set-up for DMD measurements in EUCLID operating conditions.…”

“…The Laboratoire d'Astrophysique de Marseille (LAM) has, over several years, developed different tools for modeling and characterization of MOEMS-based slit masks, especially during the design studies on JWSTNIRSpec [6,7]. ESA has engaged with Visitech and LAM in a technical assessment of using a Digital Micromirror Devices (DMD) from Texas Instruments for space applications (for example in ESA EUCLID mission).…”

Large micromirror array for multi-object spectroscopy in space

“…The contrast of a micromirror was characterized on a dedicated optical bench at LAM [9]. A light source having a diameter of 200 μm was focalized on a micromirror.…”

Uniform tilt-angle micromirror array for multi-object spectroscopy

“…Contrast measurements have been carried out on the MMA fabricated by Texas Instrument for projection displays, in order to simulate the actual MOEMS device for NIRSpec, and to establish the test procedure. 5 We can address several parameters with our modular characterization bench, as the size of the source, its location with respect to the micro-elements, the wavelength, and the input and output pupil size. Three groups of elements are considered (Fig.…”