2012
DOI: 10.1016/j.proeng.2012.01.1310
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Characterization of Nanostructured TiZrN Thin Films Deposited by Reactive DC Magnetron Co-sputtering

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Cited by 18 publications
(9 citation statements)
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“…The increasing of crystalline structure is dedicated to bombardment of energetic atoms on substrate during coating formation which leads to enhance adatoms mobility and resulted more crystalline structure. 54 Furthermore, the increasing of ion bombardment energy due to low working pressure and high substrate bias voltage prevents the motility of grain boundaries by enhancing the number of preferred nucleation sites in the growing film. This causes a reduce in average size of grain in the microstructure.…”
Section: Results and Discussion Analysis Of Coatings Structurementioning
confidence: 99%
“…The increasing of crystalline structure is dedicated to bombardment of energetic atoms on substrate during coating formation which leads to enhance adatoms mobility and resulted more crystalline structure. 54 Furthermore, the increasing of ion bombardment energy due to low working pressure and high substrate bias voltage prevents the motility of grain boundaries by enhancing the number of preferred nucleation sites in the growing film. This causes a reduce in average size of grain in the microstructure.…”
Section: Results and Discussion Analysis Of Coatings Structurementioning
confidence: 99%
“…Se puede observar que los picos de los patrones DRX de los recubrimientos producidos se localizan entre los picos del ZrN y TiN, con valores 2θ de 34,76°, 40,15° y 73,13°, correspondiendo con los planos (111), (200) y (222) de la fase (Ti,Zr)N con estructura cristalina FCC. Estos valores concuerdan con la tarjeta JCPDS 89-5214 y trabajos previos donde estudian recubrimientos de TiZrN (Kaliaraj, et al, 2015;Chinsakolthanakorn, et al, 2012) y TiZrSiN Saladukhin, et al, 2015b), ambos depositados por co-sputtering reactivo.…”
Section: Resultados Y Discuciónunclassified
“…A perfect balance between these two factors should be reached. In practice, it has been reported that the effect of adding zirconium into TiN structure to form TiZrN films not only have superior wear resistance due to formation of the stable oxide layers on the film, but it also increased hardness by solid solution strengthening [16].…”
Section: Discussionmentioning
confidence: 99%