2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2022
DOI: 10.1109/ipfa55383.2022.9915764
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Characterization of Oxide Layers on AlGaN Based DUV LEDs by TEM/STEM Analysis

J.S. Bow
1
,
Jay Wang
2
,
Wei-Chih Lai
3
et al.
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