Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors

Koh, Kah How; Kobayashi, Takeshi; Hsiao, Fu‐Li; Lee, Chengkuo

doi:10.1016/j.sna.2010.04.021

Cited by 69 publications

(48 citation statements)

References 41 publications

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“…Contrary to the DLP technology in which majority of the tasks for image production are realized optically, electronic design plays a more important role for scanning-type projectors. As demonstrated in prior studies, micro-scanning mirrors may be driven by electrostatic [5][6][7][8][9][10][11][12][13][14], electromagnetic [15][16][17][18] or piezoelectric [19][20][21][22][23] mechanisms. Each approach has its own advantages and disadvantages.…”

Section: Introductionmentioning

confidence: 82%

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Hung¹,

Lai²,

Lin³

et al. 2015

Sensors and Actuators A: Physical

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Section: Introductionmentioning

confidence: 82%

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Hung¹,

Lai²,

Lin³

et al. 2015

Sensors and Actuators A: Physical

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“…Zhang S. et al (11) doped Ca and Zr in BaTiO 3 and succeeded in generating the piezoelectric material with high piezoelectric properties. Further, Fu P. et al (12) doped La 2 O 3 in Bi based (Bi 0.5 Na 0.5 ) 0.94 Ba 0.06 TiO 3 and succeeded in generating a high performance piezoelectric material. However, these materials have problem of biocompatibility, and were not adequate for Bio-MEMS devices.…”

Section: Introductionmentioning

confidence: 99%

Development of a New Biocompatible MgSiO3 Piezoelectric Thin Film

Hwang

Uetsuji

Tanaka

et al. 2010

JMMP

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PbTiO 3 and Pb(Zr,Ti)O 3 , have been applied to various actuators and sensors due to their high piezoelectric and dielectric properties. However, the usage of lead-based materials is prohibited by Restriction of Hazardous Substances. In this study, a new biocompatible MgSiO 3 thin film is generated on the Au/SrTiO 3 (110) substrate, which is determined on basis of our three-scale analyses, by using the radio-frequency magnetron sputtering method. The crystallographic orientation of thin film was measured by using X-ray diffractometer and the displacement-voltage curves were measured by using the ferroelectric character evaluation system, respectively. An optimum condition, which leads to the highest piezoelectric property, is determined through the experimental design algorithm and the analysis of variance table schemes. The peak of MgSiO 3 (111) crystal was obtained and its intensity increased with the substrate and the post-annealing temperatures. MgSiO 3 thin films showed good piezoelectric properties, because they yielded the typical butterfly-type hysteresis curves. Additionally, the substrate temperature was significant at 1% level for piezoelectric strain constant d 33 . Optimum generating condition was obtained as T s = 300 ºC, T a = 650 ºC and f O2 = 3.0 sccm, and its piezoelectric strain constant was d 33 = 346.7 pm/V, which was higher than the values of the existing piezoelectric BaTiO 3 .

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“…The fabrication approach improved on previously reported piezoelectric devices [13, 14] by separately defining the actuator arm and optical mirror thickness: a 12 μm mirror thickness provided flatness for optical performance while a thin short actuator arm enabled a large scanning range under sub-resonant conditions. A similar fabrication approach was later used by others to demonstrate a two-dimensional rastering piezomirror [15, 16]. This device enables both bending and torsional actuation modes, however it achieves adequate scanning range only at resonance frequency operation.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical performance of piezoelectric scanning mirrors for medical endoscopy

Gilchrist

Dausch

Grego

2012

Sensors and Actuators A: Physical

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The electromechanical performance of piezoelectric scanning mirrors for endoscopy imaging is presented. The devices are supported by a single actuating cantilever to achieve a high fill factor, the ratio of mirror area to the combined mirror and actuator area. The largest fill factor devices (74%) achieved 10° mechanical scan range at +/−10V with a 300 μm long cantilever. The largest angular displacement of 30° mechanical scan range was obtained with a 500 μm long cantilever device with a 63% fill factor driven at 40 Vpp. A systematic investigation of device performance (displacement and speed) as a function of fabrication and operational parameters including the stress balance in the cantilever revealed unexpectedly large displacements with lack of inversion at the coercive field. An interpretation of the results is presented based on piezoelectric film domain orientation and clamping with supporting piezoelectric film characterization measurements.

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Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors

Cited by 69 publications

References 41 publications

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Development of a New Biocompatible MgSiO3 Piezoelectric Thin Film

Electromechanical performance of piezoelectric scanning mirrors for medical endoscopy

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