Characterization of Si 3 N 4 /SiO 2 planar lightwave circuits and ring resonators

Abstract

The large refractive index contrast between silicon nitride and silicon dioxide allows silicon nitride/dioxide planar waveguides to have a small mode size and low radiation bending loss compared with doped silicon dioxide waveguides. Small waveguide bend with low radiation loss can help make small integrated planar lightwave circuits (PLCs), and also high-Q waveguide ring resonators. This presentation will talk about the design, fabrication and characterization of low loss silicon nitride/dioxide planar waveguide devices including waveguide bend, waveguide cross, and leaky mode waveguide polarizer. The key contribution of this work is the use of the lateral mode interference (LMI) 3dB splitter to accurately measure the loss of the planar lightwave circuit devices. We will also talk about the waveguide ring resonators with silicon nitride/dioxide materials. The application for photonic biochemical sensors will also be discussed.

Ultra-low loss waveguide platform and its integration with silicon photonics

“…Overview of planar waveguide propagation loss as a function of bend radius. Data for silica and silicon nitride before 2008 (red, open), recent silicon nitride (red, solid) , silicon (blue) , indium phosphide (green squares), and gallium arsenide (green triangles) are given. Straight waveguide loss data are shown at 60‐mm radius.…”

A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics

“…The theory of evanescent microring waveguide sensors has been covered extensively in the literature [13][14][15].The schematic of our waveguide geometry is shown in Fig. 2(a).…”

Study on 760nm silicon nitride micro ring resonator filter

“…At present, silicon on insulator (SOI) [24,25] , organic polymer [26] and silicon nitride (Si3N4) [27,28] are the main materials for preparing micro ring resonators. Among them, SOI has large refractive index difference of core cladding (Δn=1.97), leading to the reduction of the waveguide mode field size but the higher coupling loss between the waveguide and the fiber; Organic polymer materials have low cost and simple preparation process.…”