Characterization of SiGe thin films using a laboratory X-ray instrument

Abstract

The technique of reciprocal space mapping using X-rays is a recognized tool for the nondestructive characterization of epitaxial films. X-ray scattering from epitaxial Si 0.4 Ge 0.6 films on Si(100) substrates using a laboratory X-ray source was investigated. It is shown that a laboratory source with a rotating anode makes it possible to investigate the material parameters of the super-thin 2-6 nm layers. For another set of partially relaxed layers, 50-200 nm thick, it is shown that from a high-resolution reciprocal space map, conditioned from diffuse scattering on dislocations, it is possible to determine quantitatively from the shape of a diffraction peak (possessing no thickness fringes) additional parameters such as misfit dislocation density and layer thickness as well as concentration and relaxation.

Bunches of misfit dislocations on the onset of relaxation of Si0.4Ge0.6/Si(001) epitaxial films revealed by high-resolution x-ray diffraction

“…The analysis of the reciprocal space maps of these samples 12 shows that the positions of dislocations are not correlated, and the correlation parameter c (defined in Ref. 16) is found to be close to 1.…”

“…3(b), which corresponds to a more homogeneous distribution of misfit dislocations which follows also from the x-ray diffraction patterns. 12 The wings of diffuse scattering in Fig. 2(a) are provided by the tilt components of the 60 dislocations.…”

“…Thinner unrelaxed and thicker relaxed films of the same series of samples were studied previouly. 12 The samples were grown by reduced pressure chemical vapor deposition in an industrial ASM Epsilon 2000 system. Germane and disilane precursors were used to grow Si 0.4 Ge 0.6 epilayers at the growth temperature of 450 C. The critical thickness for plastic relaxation at a Ge content x ¼ 0.6 is 10 nm.…”

Development of Polyethylene Glycol and Hard Fat-Based Mucoadhesive Tablets Containing Various Types of Polyvinyl Alcohols as Mucoadhesive Polymers for Buccal Application

“…Each sample was scanned between 3° and 40° in 2θ with a step size of 0.02 and scan speed of 2°/min. 29) In Vivo Experiments Male Sprague-Dawley strain rats weighing 220-280 g were purchased from Tokyo Laboratory Animals Science Co., Ltd. (Tokyo, Japan). The experimental protocol was approved by the Ethics Review Committee for Animal Experimentation of Hoshi University, which is accredited by the Ministry of Education, Culture, Sports, Science and Technology of Japan, as conforming to the Guide for the Care and Use of Laboratory Animals (Approval No.…”

Formulation and Evaluation of Morin-Loaded Solid Lipid Nanoparticles

“…Each sample was scanned between 6° and 40° in 2θ with a step size of 0.02° and scan speed of 20°/min. 28) Animal Experiments Animal and Drug Administration The animal protocols used in this study were approved by the issuing committee (the Committee on the Care and Use of Laboratory Animals of Hoshi University), which is accredited by the Ministry of Education, Culture, Sports, Science and Technology of Japan, as conforming with the Guide for the Care and Use of Laboratory Animals (Approval No. 27-048).…”