2007
DOI: 10.1016/j.snb.2006.09.021
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Characterization of silicon nanoporous pillar array as room-temperature capacitive ethanol gas sensor

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Cited by 65 publications
(31 citation statements)
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“…Utilizing Si-NPA or its nanocomposite systems as sensing media, several kinds of humidity or gas sensors with high sensitivity, short response/recovery times and small hysteresis have been prepared [205][206][207]. These results indicate that Si-NPA is a potential system both as a direct sensing material and a template for growing other sensing materials.…”
Section: Gas Detectionmentioning
confidence: 91%
“…Utilizing Si-NPA or its nanocomposite systems as sensing media, several kinds of humidity or gas sensors with high sensitivity, short response/recovery times and small hysteresis have been prepared [205][206][207]. These results indicate that Si-NPA is a potential system both as a direct sensing material and a template for growing other sensing materials.…”
Section: Gas Detectionmentioning
confidence: 91%
“…Generally, the change of the overall dielectric constant mainly originates from the organic vapour molecular adsorption and gas vapour filling at low gas concentrations, and the adsorption of gas molecules can be classified as chemisorption and physisorption [26,27]. The occurrence of chemisorption requires relatively higher energy to exceed the adsorption activation energy [28]. In our experiments, all of the measurements were carried out at room temperature, and so the chemisorption of the gas molecules on Si-NPA seemed to be difficult.…”
Section: Resultsmentioning
confidence: 99%
“…In both systems, increasing the alcohol concentration led to the elevation of the capacitance. Li et al (Li et al, 2007) using as active layer nanoporous silicon between interdigitated eletrodes observed a non-linear increase of the capacitance when the concentration of ethanol in air was increased. This interesting result is shown in Fig.…”
Section: Fuel Analysis Based On Capacitance Changementioning
confidence: 99%