Characterization of SOI MEMS capacitive accelerometer under varying acceleration shock pulse durations

Gupta, Nishi; Dutta, Shankar; Parmar, Yashoda; Gond, Vinita; Vanjari, Siva Rama Krishna; Gupta, Shrish C.

doi:10.1007/s00542-021-05227-y

Cited by 7 publications

(2 citation statements)

References 29 publications

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“…Among different sensors, inertial sensors (like accelerometer, gyroscope) are extensively used for inertial navigation, inclination estimation, posture determination, impact detection etc. (Benmessaoud & Nasreddine, 2013;Gupta et al, 2019Gupta et al, , 2021Qin et al, 2019;Shaeffer, 2013;Tsai et al, 2012;Tseng et al, 2014). Besides this, inertial switch (also known as g-switch) structures also gained considerable attention for its use in different aviation, automobile and defence applications (Cao et The MEMS based inertial switch is basically a micro electro mechanical switch which goes to off-state to on-state after attaining threshold acceleration.…”

Section: Introductionmentioning

confidence: 99%

Influence of gold coating on design and performance of high-g SOI technology based MEMS inertial switch

Vashisth,

Singh,

Yadav

et al. 2024

Preprint

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MEMS based inertial switches have important applications in defense, automobile, and aviation sectors. The materials for these inertial switches are either metals or low-resistivity silicon. This paper discussed about the amalgamation of metal and silicon in the MEMS inertial switch (500 g) structure to achieve high performance and high current handling capability. The switch structure, comprises of four series-parallel beam supported large proof-mass suspended over a gap of 4 µm. The resonant frequency of the switch structure is found to be 4.2 kHz. The dimensions of the switch structure are studied by parametric analysis. The transient response of the gold coated silicon MEMS inertial switch structure showed contact (on-state) duration of 230–380 µs due to the 10% variation in half-sine threshold acceleration value (500 g). The variation in acceleration input pulse width (0.25–1 ms) yielded a large variation in contact duration (2.5–370 µs). In response to two successive half-sine acceleration pulses, variation in contact duration is observed due to the superimposition of residual movement of the proof-mass arising due to first pulse with the response of the second acceleration pulse. The electro-thermal behaviour (under 1A current flow in the switch contact duration) of the gold coated (1.0 µm) switch structure showed a substantial reduction in temperature rise (due to Joule heating) from 413 K to 301 K. Thus, the gold coating on the silicon MEMS inertial switch lowered on-state resistance by one order and improved current handling capability due to less Joule heating issue.

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Section: Introductionmentioning

confidence: 99%

Influence of gold coating on design and performance of high-g SOI technology based MEMS inertial switch

Vashisth,

Singh,

Yadav

et al. 2024

Preprint

Self Cite

View full text Add to dashboard Cite

show abstract

“…Micromachined accelerometers are increasingly implemented in mobile and testing devices to measure motion, shocks, and vibrations. The use of accelerometers is a requirement in a wide range of applications, including inertial navigation for land 1 , water 2 , aerial 3 , and space 4 vehicles, seismology 5 , oil exploration 6 , smartphones 7 , wearable devices 8 , health monitoring 9 , vibration monitoring 10 , and shock sensing 11 .…”

Section: Introductionmentioning

confidence: 99%

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams

Hussein,

Wang,

Esteves

et al. 2023

Preprint

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Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting stiffness properties. These mechanisms allow a wide range of positive and negative stiffness tuning in their direction of motion. A mechanism of pre-shaped beams with opposite curvature, connected in a parallel configuration, can be electrothermally tuned to reach a near-zero or negative stiffness behavior at the as-fabricated position. The simple structure helps incorporate the tunable spring mechanism in different designs for accelerometers, even with different transduction technologies. The sensitivity of the accelerometer can be considerably increased or tuned for different applications by electrothermally changing the stiffness of the spring mechanism. Opposite inclined beams are implemented in a capacitive micromachined accelerometer. The measurements on fabricated prototypes showed more than 55 times gain in sensitivity compared to their initial sensitivity. The experiments showed promising results in enhancing the resolution of acceleration sensing and the potential to reach unprecedent performance in micromachined accelerometers.

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Modelling and optimization of compound lever-based displacement amplifier in a MEMS accelerometer

Jani,

Tirupathi,

Menon

et al. 2024

Microsyst Technol

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Characterization of SOI MEMS capacitive accelerometer under varying acceleration shock pulse durations

Cited by 7 publications

References 29 publications

Influence of gold coating on design and performance of high-g SOI technology based MEMS inertial switch

Influence of gold coating on design and performance of high-g SOI technology based MEMS inertial switch

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams

Modelling and optimization of compound lever-based displacement amplifier in a MEMS accelerometer

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