The porous core layer deposited by modified chemical vapour deposition process has been analyzed in terms of thickness, pore size distribution, homogeneity and characteristics of the soot particles to investigate their variation with deposition temperature and input vapour composition. The compositions selected were SiO(2), SiO(2)-GeO(2) and SiO(2)-P(2)O(5). Rare earth ions were incorporated into the deposit by a solution doping technique. The analysis of deposited microstructures was found to provide a quantitative indication about the rare earth incorporation and its variation with respect to process conditions. Thus the characterization provides a method of controlling rare earth doping and ultimate preform/fiber properties.