2020
DOI: 10.21014/acta_imeko.v9i5.993
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Characterization of spinning rotor gauge-3 using orific flow system and static expansion system

Abstract: This article elucidates the calibration of newly procured spinning rotor gauge (SRG 3) from MKS Instruments, USA using primary vacuum standards: Orifice flow system (OFS) and Static expansion system (SES) established at National Physical Laboratory, India (NPLI) in the range of 10<sup>-4</sup> Pa to 1 Pa and further compared with manufacturer reported value which was calibrated by transfer standard of National Institute of Standards &amp; Technology (NIST). The key parameters to calculate the p… Show more

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“…In this method, the pressures before and after the expansion are used for determining the expansion ratio. The gas is first enclosed in the smaller volume, then it is allowed to enter the larger volumes to expand under nearly perfect isothermal conditions [5]. This procedure is applicable only if the pressure after expansion can be measured with about the same accuracy as the pressure before expansion.…”
Section: Volume Determinationmentioning
confidence: 99%
“…In this method, the pressures before and after the expansion are used for determining the expansion ratio. The gas is first enclosed in the smaller volume, then it is allowed to enter the larger volumes to expand under nearly perfect isothermal conditions [5]. This procedure is applicable only if the pressure after expansion can be measured with about the same accuracy as the pressure before expansion.…”
Section: Volume Determinationmentioning
confidence: 99%